Title:
MOBILE DEVICE, EXPOSURE DEVICE, METHOD FOR PRODUCING FLAT PANEL DISPLAY, AND METHOD FOR PRODUCING DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/031221
Kind Code:
A1
Abstract:
A substrate stage device (20) is provided with: an X-beam (24) capable of moving in the Y-axis direction; a coarse stage (26) provided on the X-beam (24), capable of moving with the X-beam (24) in the Y-axis direction, and capable of moving in the X-axis direction relative to the X-beam (24); a fine stage (28) for supporting a substrate (P), and, when guided by the coarse stage (26), moving in the direction of the X-axis and/or the Y-axis; and a pair of step guides (30) that are respectively positioned on the +Y side and the -Y side of the X-beam (24), support the +Y-side and the -Y-side regions of the fine stage (28) from below, and are capable of moving with the fine stage (28) in the Y-axis direction.
Inventors:
AOKI YASUO (JP)
Application Number:
PCT/JP2012/005462
Publication Date:
March 07, 2013
Filing Date:
August 30, 2012
Export Citation:
Assignee:
NIKON CORP (JP)
AOKI YASUO (JP)
AOKI YASUO (JP)
International Classes:
H01L21/027
Foreign References:
| JP2011044712A | 2011-03-03 | |||
| JP2008090718A | 2008-04-17 | |||
| JP2006351785A | 2006-12-28 | |||
| JP2002025902A | 2002-01-25 |
Attorney, Agent or Firm:
TATEISHI, Atsuji (JP)
Tokuji Tateishi (JP)
Tokuji Tateishi (JP)
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Claims: