Title:
MODULE INSPECTION METHOD AND INERTIAL SENSOR
Document Type and Number:
WIPO Patent Application WO/2022/191066
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a module inspection method that can be performed with high accuracy without having to use inertial force. A module inspection method according to the present invention is used to inspect a module incorporating an inertial sensor (5). In the module inspection method, sensor sensitivity information corresponding to a prescribed inertial force of the inertial sensor (5) is acquired, a module pseudo-electrical signal is applied to the inertial sensor (5) incorporated in the module (10) to acquire module sensitivity information corresponding to the prescribed inertial force, the module sensitivity information and the sensor sensitivity information are compared, and the module (10) is inspected by using the result of comparison between the module sensitivity information and the sensor sensitivity information.
Inventors:
NAKAYOSHI YOICHI
Application Number:
PCT/JP2022/009383
Publication Date:
September 15, 2022
Filing Date:
March 04, 2022
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G01P21/00; G01C19/00
Foreign References:
| JPH08122359A | 1996-05-17 | |||
| JP2000009475A | 2000-01-14 | |||
| JP2005308531A | 2005-11-04 | |||
| JPH06331647A | 1994-12-02 | |||
| US20170248629A1 | 2017-08-31 |
Attorney, Agent or Firm:
HOKUTO PATENT ATTORNEYS OFFICE (JP)
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