Title:
MOLYBDENUM OXYHALIDE AND PREPARATION METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/171918
Kind Code:
A1
Abstract:
The present invention relates to a preparation method for a molybdenum oxyhalide for application to a molybdenum-containing thin film formation process, wherein the molybdenum oxyhalide is obtained through a reaction of sodium molybdate (Na2MoO4) and a thionyl halide (SOX2), and a high-purity molybdenum oxyhalide can be obtained at high yield.
Inventors:
HONG CHANG SUNG (KR)
KIM DONG SU (KR)
HEO JEONG HOE (KR)
OH TAE HOON (KR)
KIM SUNG RYONG (KR)
LEE SANG KYUNG (KR)
MOON YONG SEOP (KR)
IN DONG JIN (KR)
KIM DONG SU (KR)
HEO JEONG HOE (KR)
OH TAE HOON (KR)
KIM SUNG RYONG (KR)
LEE SANG KYUNG (KR)
MOON YONG SEOP (KR)
IN DONG JIN (KR)
Application Number:
PCT/KR2023/001777
Publication Date:
September 14, 2023
Filing Date:
February 08, 2023
Export Citation:
Assignee:
SK TRI CHEM CO LTD (KR)
International Classes:
C01G39/04
Foreign References:
| US3180706A | 1965-04-27 | |||
| KR20200077568A | 2020-06-30 | |||
| KR20200127226A | 2020-11-10 | |||
| KR20210158812A | 2021-12-31 | |||
| US20110305309A1 | 2011-12-15 | |||
| KR102462376B1 | 2022-11-02 |
Attorney, Agent or Firm:
LEE, Byong Jin (KR)
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