Title:
MOLYBDENUM PRECURSOR COMPOUND, PREPARATION METHOD THEREFOR, AND METHOD FOR DEPOSITING MOLYBDENUM-CONTAINING THIN FILM BY USING SAME
Document Type and Number:
WIPO Patent Application WO/2023/282615
Kind Code:
A1
Abstract:
The present invention relates to a molybdenum precursor compound, a preparation method therefor, a precursor composition comprising same for depositing a thin film, a molybdenum-containing thin film using same, and a deposition method therefor. The molybdenum precursor compound has excellent thermal stability and low resistivity, facilitates the control of deposition rates in the deposition of a molybdenum-containing thin film to thereby control the thin film to a desired thickness and composition, and enables the formation of a uniform thin film with excellent coverage even on a substrate with patterns (grooves) on a surface thereof, a porous substrate, a plastic substrate, or a complex-shaped substrate, thereby realizing a high-quality molybdenum-containing thin film.
Inventors:
KIM JIN SIK (KR)
KIM MYEONG HO (KR)
CHOI JUN HWAN (KR)
KIM MYEONG HO (KR)
CHOI JUN HWAN (KR)
Application Number:
PCT/KR2022/009748
Publication Date:
January 12, 2023
Filing Date:
July 06, 2022
Export Citation:
Assignee:
UP CHEMICAL CO LTD (KR)
International Classes:
C23C16/40; C07F11/00; C23C16/18; C23C16/34; C23C16/448; C23C16/455
Foreign References:
| KR20210058370A | 2021-05-24 | |||
| KR20140025408A | 2014-03-04 |
Other References:
BLAIVE B., LEGSAÏ G., LAÏ R.: "Utilization of d0, d1, d2 electron configurations to obtain parameters for transition metals in the molecular mechanics of dioxo- or diimido-tetrahedral complexes (Cr, Mo, Re, Os)", JOURNAL OF MOLECULAR STRUCTURE, ELSEVIER AMSTERDAM, NL, vol. 354, no. 3, 1 August 1995 (1995-08-01), NL , pages 245 - 250, XP093021665, ISSN: 0022-2860, DOI: 10.1016/0022-2860(95)08894-2
TAKACS JANOS, CAVELL RONALD G.: "Synthesis and Characterization of New d0 Tungsten and Molybdenum Imido Complexes with Heteroatomic Bifunctional O-N Chelate Ligands", INORGANIC CHEMISTRY, AMERICAN CHEMICAL SOCIETY, EASTON , US, vol. 33, no. 12, 1 June 1994 (1994-06-01), Easton , US , pages 2635 - 2638, XP093021668, ISSN: 0020-1669, DOI: 10.1021/ic00090a026
SULLIVAN A C, ET AL.: "SYNTHESIS AND REACTIONS OF D° IMIDO ARYL DERIVATIVES OF CHROMIUM, MOLYBDENUM, AND TUNGSTEN. CRYSTAL STRUCTURES OF CR(NBUT)2(C6H2ME3-2,4,6)2'MO(NBUT)2(C6H3ME2-2,6)2' AND CR(NBUT)2ÄC(C6H2ME3-2,4,6)=NBUTÜ-(C6H2ME3-2,4,6)", JOURNAL OF THE CHEMICAL SOCIETY, DALTON TRANSACTIONS., CHEMICAL SOCIETY. LETCHWORTH., GB, 1 January 1988 (1988-01-01), GB , pages 53 - 60, XP001194656, ISSN: 1472-7773, DOI: 10.1039/dt9880000053
TAKACS JANOS, CAVELL RONALD G.: "Synthesis and Characterization of New d0 Tungsten and Molybdenum Imido Complexes with Heteroatomic Bifunctional O-N Chelate Ligands", INORGANIC CHEMISTRY, AMERICAN CHEMICAL SOCIETY, EASTON , US, vol. 33, no. 12, 1 June 1994 (1994-06-01), Easton , US , pages 2635 - 2638, XP093021668, ISSN: 0020-1669, DOI: 10.1021/ic00090a026
SULLIVAN A C, ET AL.: "SYNTHESIS AND REACTIONS OF D° IMIDO ARYL DERIVATIVES OF CHROMIUM, MOLYBDENUM, AND TUNGSTEN. CRYSTAL STRUCTURES OF CR(NBUT)2(C6H2ME3-2,4,6)2'MO(NBUT)2(C6H3ME2-2,6)2' AND CR(NBUT)2ÄC(C6H2ME3-2,4,6)=NBUTÜ-(C6H2ME3-2,4,6)", JOURNAL OF THE CHEMICAL SOCIETY, DALTON TRANSACTIONS., CHEMICAL SOCIETY. LETCHWORTH., GB, 1 January 1988 (1988-01-01), GB , pages 53 - 60, XP001194656, ISSN: 1472-7773, DOI: 10.1039/dt9880000053
Attorney, Agent or Firm:
FIRSTLAW P.C. (KR)
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