Title:
MOUNTING TABLE AND SUBSTRATE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/270376
Kind Code:
A1
Abstract:
According to the present invention, a mounting part is provided with a first surface on which an object to be supported is mounted, and a second surface which is the reverse side of the first surface, the mounting part having a through-hole penetrating through the first surface and the second surface. A first pin member is disposed in the through-hole and can move in the axial direction of the through-hole. A second pin member is disposed on the second surface side with respect to the first pin member in the through-hole, and can move in the axial direction. A driving unit drives the second pin member in the axial direction. The first pin member has a lid part formed thereon that widens the width of the tip end on the first surface side. The through-hole has, on an opening portion on the first surface side, a recess that engages with the lid part when the first pin member is stored in the through-hole.
Inventors:
ISHIDA TOSHIFUMI (JP)
MAKABE MASATSUGU (JP)
KASHIWAZAKI MASAKATSU (JP)
TAWARA KAZUMA (JP)
MAKABE MASATSUGU (JP)
KASHIWAZAKI MASAKATSU (JP)
TAWARA KAZUMA (JP)
Application Number:
PCT/JP2022/023935
Publication Date:
December 29, 2022
Filing Date:
June 15, 2022
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/205; H01L21/3065; H01L21/683
Domestic Patent References:
| WO2009034895A1 | 2009-03-19 | |||
| WO2007077765A1 | 2007-07-12 |
Foreign References:
| JP2003197719A | 2003-07-11 | |||
| JP2013058690A | 2013-03-28 | |||
| JP2004349516A | 2004-12-09 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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