MULTI-AXIAL ANGULAR VELOCITY SENSOR

Title:

MULTI-AXIAL ANGULAR VELOCITY SENSOR

Document Type and Number:

WIPO Patent Application WO/2020/111041

Kind Code:

A1

Abstract:

Provided is a multi-axial angular velocity sensor in which a substrate part which is perpendicular to a D3 axis comprises a pair of long edges which are parallel to a D2 axis and a pair of short edges which are parallel to a D1 axis. Three sensor elements for the three axes are mounted on the upper surface of the substrate part. Piezoelectric bodies of the sensor elements comprise a plurality of arms. The arms extend in prescribed extension directions on the upper surface in plan view. Longitudinal directions of the piezoelectric bodies correspond to the extension directions of the arms. Two of the three sensor elements have the extension directions of the arms oriented parallel to the long edges of the substrate part and are aligned in the direction which is in line with the short edges of the substrate part. The remaining one sensor element has the extension directions of the arms oriented parallel to the short edges and is aligned in the direction which is in line with the long edges with regard to the two sensor elements.

Inventors:

SOEJIMA MUNETAKA (JP)
TAKANAMI SHUN (JP)

Application Number:

PCT/JP2019/046103

Publication Date:

June 04, 2020

Filing Date:

November 26, 2019

Export Citation:

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Assignee:

KYOCERA CORP (JP)

International Classes:

H01L41/047; G01C19/5628; H01L41/053; H01L41/113; H01L41/29; H01L41/332

Domestic Patent References:

WO2018139396A1	2018-08-02
WO2018021166A1	2018-02-01
WO2018021167A1	2018-02-01

Foreign References:

JP2006010659A	2006-01-12
JP2000074673A	2000-03-14
JP2016031270A	2016-03-07
JP2007322295A	2007-12-13
JP2013238437A	2013-11-28
JP2008185343A	2008-08-14
JP2013178264A	2013-09-09
JP2015141183A	2015-08-03
JP2015141184A	2015-08-03
JP2015099130A	2015-05-28
JP2015141182A	2015-08-03

Other References: