Title:
MULTI-BLOCK SPUTTERING TARGET WITH INTERFACE PORTIONS AND ASSOCIATED METHODS AND ARTICLES
Document Type and Number:
WIPO Patent Application WO/2013/169342
Kind Code:
A8
Abstract:
A sputtering target that includes at least two consolidated blocks, each block' including an alloy including a first metai (e.g., a refractory metal such as molybdenum in an amount greater than about 30 percent by weight) and at least one additional alloying ingredient; and a joint between the at least two consolidated blocks:, the joint being prepared free of any microstructure derived from a diffusion bond of an added loose powder. A process for making the target includes hot isostatically pressing (e.g., below a temperature of 1080°C), consolidated preform blocks that, prior to pressing, have interposed between- the consolidated powder metal blocks at least one continuous solid interface portion. The at least one continuous solid interface portion may include a cold spray body, which may be a mass of cold spray deposited powders on a surface a block, a sintered preform,, a compacted powder body {e.g,, a tile), or any combination thereof.
Inventors:
ROZAK GARY ALAN (US)
GAYDOS MARK A (US)
MICHALUK CHRISTOPHER (US)
GAYDOS MARK A (US)
MICHALUK CHRISTOPHER (US)
Application Number:
PCT/US2013/030316
Publication Date:
March 20, 2014
Filing Date:
March 12, 2013
Export Citation:
Assignee:
STARCK H C INC (US)
International Classes:
C23C14/34; B22F1/00; B22F3/15; C22C1/04
Attorney, Agent or Firm:
DOBRUSIN, Eric, M. et al. (P.C.29 W. Lawrence Street, Suite 21, Pontiac MI, US)
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