Title:
MULTI-CHAMBER VACUUM MAGNETRON SPUTTERING COATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/024321
Kind Code:
A1
Abstract:
Disclosed in the present utility model is a multi-chamber vacuum magnetron sputtering coating apparatus. The multi-chamber vacuum magnetron sputtering coating apparatus comprises an operating mechanism, a conveying part, a front chamber, and a coating chamber; a member to be coated is placed on a workpiece rotating frame; the conveying part is connected to the front chamber; the front chamber is connected to the coating chamber; the conveying part, the front chamber, and the coating chamber form a coating channel of the member to be coated; the front chamber and the coating chamber are each provided with a vacuum device; the workpiece rotating frame rotates in the coating chamber by means of the operating mechanism; a blocking apparatus is arranged between the front chamber and the coating chamber; the blocking apparatus is used for blocking the coating channel so that the front chamber and the coating chamber are separate sealed chambers; the front chamber is provided with a heating mechanism and a first transferring mechanism; the heating mechanism is arranged on the chamber wall of the front chamber; the first transferring mechanism is arranged at the bottom of the front chamber; the workpiece rotating frame is moved to the front chamber by means of the first transferring mechanism. According to the technical solution of the present utility model, the front chamber and the coating chamber can be partitioned and sealed or opened and communicated by means of a partition body, so that the sealing performance is improved.
Inventors:
SUN GUIHONG (CN)
HUANG GUOXING (CN)
ZHU HAISHENG (CN)
LIANG HONG (CN)
CHEN LI (CN)
TANG LIAN (CN)
TANG HONGBO (CN)
HUANG GUOXING (CN)
ZHU HAISHENG (CN)
LIANG HONG (CN)
CHEN LI (CN)
TANG LIAN (CN)
TANG HONGBO (CN)
Application Number:
PCT/CN2021/136469
Publication Date:
March 02, 2023
Filing Date:
December 08, 2021
Export Citation:
Assignee:
XIANGTAN HONGDA VACUUM TECH CO LTD (CN)
International Classes:
C23C14/35; C23C14/56
Foreign References:
| CN112080731A | 2020-12-15 | |||
| CN213507173U | 2021-06-22 | |||
| CN207331047U | 2018-05-08 | |||
| CN112342516A | 2021-02-09 |
Attorney, Agent or Firm:
CHANGSHA XINZHILI INTELLECTUAL PROPERTY AGENCY (GENERAL PARTNERSHIP) (CN)
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