Title:
MULTI-CHARGED PARTICLE BEAM IRRADIATION DEVICE, MULTI-CHARGED PARTICLE BEAM IRRADIATION METHOD, AND BLANKING APERTURE ARRAY MOUNTING BOARD REPLACEMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2024/009611
Kind Code:
A1
Abstract:
[Problem] To provide a multi-charged particle beam irradiation device in which a blanking aperture array mounting board can be appropriately replaced while suppressing the reduction in an operating rate, a multi-charged particle beam irradiation method, and a blanking aperture array mounting board replacement method. [Solution] This multi-charged particle beam irradiation device comprises: an emission unit that emits a multi-charged particle beam array; a blanking aperture array mounting board in which a plurality of blankers are disposed that perform blanking deflection on each beam of the multi-charged particle beam array; a carrying mechanism that carries the blanking aperture array mounting board between a lens barrel and a spare chamber; wiring having one end connected to the blanking aperture array mounting board, having the other end connected to a control unit outside the spare chamber via a feed-through, and used for performing energization control on the blankers from the control unit; a door between the spare chamber and the outside; a gate valve between the spare chamber and the lens barrel; and a pump that exhausts the spare chamber.
Inventors:
OKAZAWA MITSUHIRO (JP)
Application Number:
PCT/JP2023/018131
Publication Date:
January 11, 2024
Filing Date:
May 15, 2023
Export Citation:
Assignee:
NUFLARE TECHNOLOGY INC (JP)
International Classes:
H01J37/147; G03F7/20; H01J37/305; H01L21/027
Foreign References:
| JPH07254540A | 1995-10-03 | |||
| JP2008129358A | 2008-06-05 | |||
| JP2016201491A | 2016-12-01 | |||
| JP2005166862A | 2005-06-23 |
Attorney, Agent or Firm:
MIYAJIMA Manabu et al. (JP)
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