Title:
MULTI-DIMENSIONAL MULTI-PARAMETER GAS SENSOR AND MANUFACTURING METHOD THEREFOR, AND GAS DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/203803
Kind Code:
A1
Abstract:
The present invention relates to the technical field of gas sensors. Disclosed are a multi-dimensional multi-parameter gas sensor and a manufacturing method therefor. The gas sensor comprises: a sensing structure that is used for generating, for a variety of gases, multiple corresponding electric signals, and comprises a plurality of measuring electrodes and a gas sensitive film coating the measuring electrodes; and a micro-heating structure that is used for providing different heating temperatures for the sensing structure, and comprises a silicon-based substrate and a heating layer disposed on the silicon-based substrate. The heating layer integrates heating electrodes of different sizes or different layouts to form a plurality of heating regions of different temperatures, and the plurality of measuring electrodes are respectively disposed in the corresponding heating regions. According to the present invention, by integrating heating electrodes of different sizes or different layouts on a single micro-heating structure to form heating regions of different temperatures, a complex atmosphere detection function of a variety of sensing materials at different temperatures is achieved; in addition, the volume of the whole device is decreased, the power consumption is reduced, and the integration level of the gas sensor is improved.
Inventors:
LI NA (CN)
AN FEI (CN)
SUN BING (CN)
YANG ZHE (CN)
MU SHANJUN (CN)
XU WEI (CN)
JIANG JIE (CN)
WANG HAOZHI (CN)
WANG SHIQIANG (CN)
AN FEI (CN)
SUN BING (CN)
YANG ZHE (CN)
MU SHANJUN (CN)
XU WEI (CN)
JIANG JIE (CN)
WANG HAOZHI (CN)
WANG SHIQIANG (CN)
Application Number:
PCT/CN2021/073721
Publication Date:
October 14, 2021
Filing Date:
January 26, 2021
Export Citation:
Assignee:
CHINA PETROLEUM & CHEM CORP (CN)
CHINA PETROLEUM & CHEMICAL CORPORATION QINGDAO RES INSTITUTE OF SAFETY ENGINEERING (CN)
CHINA PETROLEUM & CHEMICAL CORPORATION QINGDAO RES INSTITUTE OF SAFETY ENGINEERING (CN)
International Classes:
G01N27/12
Foreign References:
| EP2778667A1 | 2014-09-17 | |||
| JP2014153135A | 2014-08-25 | |||
| CN110161084A | 2019-08-23 | |||
| GB2422017A | 2006-07-12 |
Other References:
See also references of EP 4102216A4
Attorney, Agent or Firm:
RUNPING & PARTNERS (CN)
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