BACKGROUND

[0001] Physical Vapor Deposition (PVD) is a process of depositing films of materials over substrates, where thickness of films is in the range of nanometers to micrometers. PVD, in general, involves generation of vapors of materials using high temperature, transferring the vapors in a vacuum to a surface of a substrate, and condensation of the vapors on the surface of the substrate to deposit the film(s). PVD can be used to deposit films of different materials on a variety of substrates that may include metals, plastics, ceramics, carbon fibers and other composite materials.

BRIEF DESCRIPTION OF DRAWINGS

[0002] The following detailed description references the drawings, wherein:

[0003] Fig. 1 illustrates a system for multi-directional Physical Vapor Deposition (PVD), according to an example of the present subject matter;

[0004] Fig. 2 illustrates a system for mu!ti-directlonal PVD, according to an example of the present subject matter;

[0006] Fig. 3 illustrates a system for multi-directional PVD, according to an example of the present subject matter;

[0006] Fig. 4 illustrates a system for multi-directional PVD, according to an example of the present subject matter; and

[0007] Fig. 5 illustrates a PVD chamber for multi-directional PVD, according to an example of the present subject matter.

DETAILED DESCRIPTION

[0008] PVD process of depositing a layer of a depositing material on substrates includes providing of substrates in batches into a vacuum chamber where vapors of the depositing material are deposited onto a surface of the substrates. Performing the PVD process in batches is time consuming and hinders productivity of film coated substrates when performed at an industrial level.

[0009] According to an example of the present subject matter, techniques for continuous multi-directional PVD are described. In an example, a system for multi-directional PVD is described. The system for multi-directional PVD may hold substrates for the PVD on conveyer belt(s) in various orientations and different directions, such that a film of depositing materials can be deposited from different directions onto the substrates within the PVD chamber. The orientation of the substrates in different directions allows the depositing material to be deposited from multiple directions onto the substrates and provides for efficient coating of depositing material onto the substrates.

[0010] In an example of the present subject matter, the system for multi directional PVD may include a conveyer belt having a first side and a second side, such that the first side is opposite to the second side. The first side of the conveyer belt may hold a first set of substrates for PVD, and the second side of the conveyer belt may hold a second set of substrates for PVD. in an example, the conveyer belt may carry the first set of substrates and the second set of substrates into a PVD chamber for the PVD. In the PVD chamber, a depositing material may be discharged onto the first set of substrates and the second set of substrates. Simultaneous deposition of the depositing material onto the first set of substrates and the second set of substrates allows for utilization of different sides of the conveyer belt for the PVD, thereby increasing the productivity of film coated substrates.

[0011] In another example of the present subject matter, the system for multi-directional PVD may include multiple conveyer belts, arranged at different angles with respect to each other, and to carry substrates in various directions. The arrangement of the conveyer belts at different angles may allow substrates to be mounted in various orientations, such that coating of the depositing materiai can be done from different directions. Simultaneous coating of depositing materiai from different directions may increase the rate of the PVD process, thereby increasing the productivity of film coated substrates.

[0012] For example, the system for muiti-directional PVD may include two conveyer belts, such as a first conveyer belt and a second conveyer belt. The first conveyer belt may include a first surface to hold a first set of substrates and the second conveyer belt may include a second surface to hold a second set of substrates for the PVD. in an example, the first surface of the first conveyer belt is at a predefined angle with respect to the second surface of the second conveyer belt. For instance, the predefined angle between the first surface of the first conveyer belt and the second surface of the second conveyer belt is about, one of, 90°, 120°, 145°, and 180°

[0013] It would be noted that the predefined angle between the first surface and the second surface, would also be the angle between the first set of substrates disposed on the first conveyer belt and second set of substrates disposed on the second conveyer belt. For example, if the predefined angle is about 180° and the first surface of the first conveyer belt and the second surface of the second conveyer belt are opposite to each other, the first set of substrates and the second set of substrates may also be disposed opposite to each other.

[0014] In operation, the first conveyer belt and the second conveyer belt may carry the first set of substrates and the second set of substrates, respectively, into a PVD chamber where depositing materiai is coated over the substrates from different directions in an example, if the first surface of the first conveyer belt and the second surface of the second conveyer belt are arranged at about 180° with respect to each other, the depositing material may be coated onto the first set of substrates and the second set of substrates from opposite directions, such as top and bottom of the PVD chamber.

[0016] In another example, the system for the multi-directional PVD may include three conveyer belts, such that the surface of each conveyer belt is arranged at about 120° with respect to a surface of another conveyer belt. Each conveyer belt may hold substrates, which may be disposed over surface of the conveyer belt. Further, the substrates on different conveyer belts may also be have a 120° angle with respect to each other. The three conveyer belts may carry the substrates into the PVD chamber for deposition of a film of depositing material over the substrates. In such an arrangement, the PVD chamber may discharge the depositing material from three different directions to deposit the film of depositing material onto the substrates.

[0016] In an example of the present subject matter, each conveyer belt may hold the substrate such that the substrate can be moved from one point to another over the conveyer belt, without toppling or falling. Since multiple conveyer belts are arranged in different configurations, to prevent the substrates disposed on the conveyer belts from dislodging during the movement of the conveyer belts, each substrate may be fastened to the conveyer belt. In an example, the conveyer belt may include fasteners, such as ties, fit housings, vacuum holders, or a combination thereof, to hold a substrate during movement of the conveyer belt. Therefore, through different fastening mechanisms, each conveyer belt may hold the substrates.

[0017] Thus, the utilization of the described techniques of multi-directional PVD may allow coating of films over substrates from different directions, thereby improving the productivity of film coated substrates.

[0018] The above techniques are further described with reference to Figs. 1 - 5. if should be noted that the description and the figures merely illustrate the principles of the present subject matter along with examples described herein and should not be construed as a limitation to the present subject matter it is thus understood that various arrangements may be devised that, although not explicitly described or shown herein, embody the principles of the present subject matter. Moreover, ail statements herein reciting principles, aspects, and examples of the present subject matter, as well as specific examples thereof, are intended to encompass equivalents thereof.

[0019] Fig. 1 illustrates a system 100 for multi-directional PVD, according to an example of the present subject matter. In an example of the present subject matter, the system 100 includes a first conveyer belt 102-1 and a second conveyer belt 102-2. The first conveyer belt 102-1 may hold a first set of substrates 104-1 , 104-2, .. , 104-n on its first surface‘A’ and the second conveyer belt 102-2 may hold a second set of substrates 106-1 , 106-2, ... , 106-n on its second surface‘B’.

[0020] In an example of the present subject matter, the first surface‘A’ of the first conveyer belt 102-1 and the second surface‘B’ of the second conveyer belt 102-2 may be arranged at a predefined angle with respect to each other. For example, the first surface A’ of the first conveyer belt 102-1 and the second surface‘B’ of the second conveyer belt 102-2 may be arranged at an angle between 0° to 360°, with respect to each other. In case the predefined angle is about 180°, the first conveyer belt 102-1 and the second conveyer belt 102-2 may be arranged substantially opposite to each other, as depicted in Fig. 1.

[0021] While Fig. 1 depicts an arrangement of the first conveyer belt 102-1 and the second conveyer belt 102-2 where the predefined angle between the first surface‘A’ and the second surface‘B’ is about 180°, it would be noted that the first conveyer belt 102-1 and the second conveyer belt 102-2 may be arranged differently as well, such that the predefined angle between the first surface“A and the second surface‘B’ is between 0° to 360°. However, such examples have not been depicted and described for the sake of brevity.

[0022] in an example, the first conveyer belt 102-1 may rotate such that the first set of substrates 104-1 , 104-2, ... , 104-n are moved in the 1 ^st direction and the second conveyer belt 102-2 may rotate such that the second set of substrates 106-1 , 106-2, ... , 106-n are moved in the second direction. The first set of substrates 104-1 , 104-2, ... , 104-n and the second set of substrates 106-1 , 106- 2, ... , 106-n may be of metal, metal alloy, plastic, ceramic, carbon fiber, and composite material.

[0023] Further, the system 100 may also include a PVD chamber 108 to discharge a depositing material for coating a film onto the first set of substrates 104-1 , 104-2, ... , 104-n and the second set of substrates 108-1 , 106-2, ... , 106- n. The PVD chamber 108 may discharge the depositing material in the 4 ^th direction to form a film of the depositing materia! onto the first set of substrates 104-1 , 104-2, ... , 104-n, and in the 3 ^rd direction to form a film of the depositing material onto the second set of substrates 106-1 , 106-2, ... , 106-n. [0024] In operation, the first conveyer belt 102-1 and the second conveyer belt 102-2 may move the first set of substrates 104-1 , 104-2, . , 104-n and the second set of substrates 108-1 , 106-2, ... , 106-n info the PVD chamber 108. The PVD chamber 108 may discharge the depositing material onto the first set of substrates 104-1 , 104-2, 104-n and the second set of substrates 106-1 , 106-

2, ... , 106-n for coating of a film of the depositing material.

[002S] The various functions and operations of the system 100 for the multi directional PVD is further described in detail in reference to Fig. 2.

[0026] Fig. 2 depicts the system 100 for multi-directional PVD, according to an example of the present subject matter. In an example, the system 100 may include the first conveyer belt 102-1 and the second conveyer belt 102-2 to hold the first set of substrates 104-1 , 104-2, ... , 104-n and the second set of substrates 106-1 , 108-2, ... , 106-n, on first surface ‘A’ and the second surface Ί3’, respectively.

[0027] in an example of the present subject matter, the first conveyer belt 102-1 may move the first set of substrates 104-1 , 104-2, ... , 104-n into the PVD chamber 108 for the PVD process by moving in the 1 ^st direction. Similarly, the second conveyer belt 102-2 may move the second set of substrates 106-1 , 106- 2, . . , 106-n into the PVD chamber 108 for the PVD process by moving in the 2 ^nd direction.

[0028] in an example of the present subject matter, each conveyer belt may include fasteners to hold substrates, such that the substrates do not fail, topple, or otherwise move out of position on the conveyor belt during the movement of the conveyer belt. For example, the first conveyer belt 102-1 may include a first set of fasteners 202-1 , 202-m, ... , 202-n, to hold the first set of substrates 104-1 , 104-2, ... , 104-n, and the second conveyer belt 102-2 may include second set of fasteners 204-1 , 204-m, ... , 204-n, to hold the second set of substrates 106-1 , 106-2, ... , 106-n.

[0029] it would be noted that since the first conveyer belt 102-1 and the second conveyer belt 102-2 are arranged such that the first surface A’ of the first conveyer belt 102-1 is at a predefined angle with respect to the second surface ‘B’ of the second conveyer belt 102-2, the first set of fasteners 202-1 , 202-m, 202-n and the second set of fasteners 204-1 , 204-m, 204-n may fasten the first set of substrates 104-1 , 104-2, 104-n, and the second set of substrates

106-1 , 106-2, ... , 1 Q8-n to the first conveyer belt 102-1 and second conveyer belt 102-2, respectively. In an example of the present subject matter, the first set of fasteners 202-1 , 202-m, .... 202-n and the second set of fasteners 204-1 , 204-m, ... , 204-n may also be at the predefined angle with respect to each other.

[0030] in an example, first set of fasteners 202-1 , 202-m, ... , 202-n and the second set of fasteners 204-1 , 204-m, .... 204-n may include one of, but not limited to, ties, fit housings, and vacuum holders to hold the substrate during movement of the conveyer belts.

[0031] in an example of the present subject matter, the PVD chamber 108 may include multiple discharging units, such as a first discharging unit 206-1 and a second discharging unit 206-2 to discharge the depositing material onto the first set of substrates 104-1 , 104-2, ... , 104-n and the second set of substrates 106- 1 , 106-2, ... , 106-n, respectively.

[0032] in operation, the first conveyer belt 102-1 may receive first set of substrates 104-1 , 104-2, ... , 104-n from location 208-1. The first set of fasteners 202-1 , 202-m, ... , 202-n may receive the first set of substrates 104-1 , 104-2, ... , 104-n and fasten them to the first conveyer belt 102-1 such that the first set of substrates 104-1 , 104-2, ... , 104-n are moved into the PVD chamber 108 in the 1 ^st direction along with the first conveyor belt 102-1. Similarly, the second conveyer belt 102-2 may receive the second set of substrates 106-1 , 106-2, ... , 106-n from location 208-2 such that the second set of fasteners 204-1 , 204-m,

... , 204-n may fasten the second set of substrates 106-1 , 106-2, ... , 108-n to the second conveyer belt 102-2. Further, the second conveyer belt 102-2 may move in the 2 ^nd direction such that the second set of substrates 106-1 , 106-2, ... , 106- n are moved into the PVD chamber 108 in the 2 ^rici direction.

[0033] While the first conveyer belt 102-1 and the second conveyer belt 102- 2 move and the first set of substrates 104-1 , 104-2, ... , 104-n and the second set of substrates 106-1 , 106-2, ... , 10S~n get into the PVD chamber 108, each of the discharging units may discharge the depositing material. For example, the first discharging unit 206-1 may discharge the depositing material in the 4 ^th direction to coat a film of the depositing material onto the first set of substrates 104-1 , 104- 2, . , 104-n, and the second discharging unit 208-2 may discharge the depositing material in the 3 ^rd direction to coat a film of the depositing material onto the second set of substrates 106-1 , 106-2, 106-n.

[0034] it would be noted that in an example, where the predefined angle between the first surface ‘A’ and the second surface Ί3’ is about 180°, the arrangement of the first conveyer belt 102-1 and second conveyer belt 102-2 may be such that the first surface‘A’ of the first conveyer belt 102-1 and the second surface‘B’ of the second conveyer belt 102-2 are substantially horizontal. In such an arrangement, while first set of substrates 104-1 , 104-2, 104-n may rest on the first surface‘A’ due to gravity, the second set of substrates 106-1 , 106-2, 106-n may be fastened to the second conveyer belt 102-2 by the second set of fasteners 204-1 , 204-m, 204-n.

[003S] in another example, where the predefined angle between the first surface‘A’ and the second surface‘B’ is about 180°, the arrangement of the first conveyer belt 102-1 and second conveyer belt 102-2 may be such that the first surface‘A of the first conveyer belt 102-1 and the second surface‘B’ of the second conveyer belt 102-2 are substantially vertical. In such an arrangement, the first set of substrates 104-1 , 104-2, ... , 104-n may be fastened to the first conveyer belt 102-1 by the first set of fasteners 202-1 , 202-m, .. , 202-n, and the second set of substrates 106-1 , 106-2, ... , 106-n may be fastened to the second conveyer belt 102-2 by the second set of fasteners 204-1 , 204-m, ... , 204-n [0036] As described earlier, the first set of fasteners 202-1 , 202-m, . , 202- n and the second set of fasteners 204-1 , 204-m, ... , 204-n may include vacuum holders to hold substrates through vacuum adsorption.

[0037] Upon coating of a film of the depositing materials onto the first set of substrates 104-1 , 104-2, 104-n and the second set of substrates 106-1 , 106-

2, ... , 106-n, the first set of substrates 104-1 , 104-2, ... , 104-n and the second set of substrates 106-1 , 106-2, ... , 106-n are taken out of the PVD chamber 108. in an example of the present subject matter, the first set of substrates 104-1 , 104-2, ... , 104-n may be taken away from the first conveyer belt 102-1 from a location 210-1 and the second set of substrates 106-1 , 106-2, 106-n may be taken away from the second conveyer belt 102-2 from a location 210-2.

[0038] Fig. 3 depicts another system 300 for multi-directional PVD, according to an example of the present subject matter. In an example, the system 300 may include a conveyer belt 301. The conveyer belt may include a first side 302-1 and a second side 302-2. The first side 302-1 may hold a first set of substrates 304-1 , 304-2, ... , 304-n, and the second side 302-2 may hold a second set of substrates 306-1 , 306-2, 306-n The system 300 may further include a

PVD chamber 308 to discharge the depositing material for coating a film of the depositing material onto the first set of substrates 304-1 , 304-2, ... , 304-n and the second set of substrates 306-1 , 306-2, ... , 306-n.

[0039] In an example of the present subject matter, the conveyer belt 301 may move the first set of substrates 304-1 , 304-2, ... , 304-n, and the second set of substrates 306-1 , 306-2, ... , 306-n into the PVD chamber 308 for deposition of the film of the depositing material.

[0040] The various functions and operations of the system 300 for the multi directional PVD is further described in detail in reference to Fig. 4.

[0041] Fig. 4 depicts the system 400 for multi-directional PVD, according to an example of the present subject matter. In an example, the system 400 may include the conveyer belt 301 , where the first side 302-1 is to hold the first set of substrates 304-1 , 304-2, ... , 304-n and the second side 302-2 is to hold the second set of substrates 306-1 , 306-2, ... , 306-n.

[0042] In an example of the present subject matter, the conveyer belt 301 may move such that the first side 302-1 moves in the 1 ^st direction and the first set of substrates 304-1 , 304-2, ... , 304-n enter into the PVD chamber 108 by moving in the 1 ^si direction; and the second side 302-2 moves in the 2 ^nd direction such that the second set of substrates 306-1 , 306-2, ... , 306-n enter into the PVD chamber 108 by moving by moving in the 2 ^nd direction.

[0043] in an example of the present subject matter, the conveyer belt 301 may include fasteners 402 to hold the first set of substrates 304-1 , 304-2, .... 304- n and second set of substrates 306-1 , 306-2, ... , 306-n. The fasteners 402 may fasten the first set of substrates 304-1 , 304-2, ... , 304-n and second set of substrates 306-1 , 306-2, ... , 306-n to the conveyer belt 301 such that the first set of substrates 304-1 , 304-2, ... , 304-n and second set of substrates 306-1 , 306-2,

... , 306-n do not topple or fall during the movement of the conveyer belt 301.

[0044] In an example of the present subject matter, the PVD chamber 308 may include multiple discharging units, such as a first discharging unit 404-1 and a second discharging unit 404-2 to discharge the depositing material onto the first set of substrates 304-1 , 304-2, 304-n and the second set of substrates 306-

1 , 306-2, ... , 306-n, respectively

[0045] in operation, the conveyer belt 301 may receive the first set of substrates 304-1 , 304-2, 304-n from a location 406-1 . Further, the conveyer belt 301 may move the first set of substrates 304-1 , 304-2, 304-n and the second set of substrates 306-1 , 306-2, ... , 306-n info the PVD chamber 308 for coating a film of the depositing material.

[0046] While the first set of substrates 304-1 , 304-2, ... , 304-n and the second set of substrates 306-1 , 306-2, 306-n are moved into the PVD chamber 308, each of the discharging units, 404-1 and 404-2, may discharge the depositing material. For example, the first discharging unit 404-1 may discharge the depositing material in the 4 ^th direction to coat a film of the depositing material onto the first set of substrates 304-1 , 304-2, 304-n, and the second discharging unit 404-2 may discharge the depositing material in the 3 ^rd direction to coat a film of the depositing material onto the second set of substrates 306-1 , 306-2, 306-n.

[0047] it would be noted that since the conveyer belt 301 carries the second set of substrates 306-1 , 306-2, ... , 306-n on the second side 302-2 in the 2 ^nd direction, the second set of substrates 306-1 , 306-2, ... , 306-n may move further and come to the first side 302-1 of the conveyer belt 301. In such a scenario, the second set of substrates 306-1 , 306-2, .... 306-n, onto which the coating of film has been deposited in the PVD chamber 308, may get coated with another film of depositing material by entering the PVD chamber 308 while moving in the 1 ^st direction. Thus, the system 400 may be utilized to provide double coating of the depositing material onto the substrates. [0048] It would be noted that while the system 400 is depicted to provide double coating of the depositing material onto substrates by moving the substrates form the second side 302-2 to the first side 302-1 , the system 400 may also be arranged in another configuration, such as depicted in Fig. 3, so that the substrates remain on one side of the conveyer belt 301.

[0049] As described earlier, the fasteners 402 may include vacuum holders to hold the first set of substrates 304-1 , 304-2, 304-n and the second set of substrates 306-1 , 306-2, ... , 306-n through vacuum adsorption.

[0050] Upon coating the film of the depositing materials onto the second set of substrates 306-1 , 306-2, ... , 306-n, the second set of substrates 306-1 , 306-2, ... , 306-n are taken out of the PVD chamber 108. In an example of the present subject matter, the second set of substrates 306-1 , 306-2, ... , 306-n may be taken away from the conveyer belt 301 from a location 406-2.

[0051] Fig. 5 illustrates a PVD chamber 500 for multi-directional PVD, according to an example implementation of the present subject matter. The PVD chamber 500 include multiple openings for ingress and egress of conveyer belts. For example, the PVD chamber 500 may include a first set of opening 502-1 and 502-2 for ingress and egress of a first conveyer belt 504-1 , and a second set of openings 502-3 and 502-4 for ingress and egress of a second conveyer belt 504- 2, respectively. The first conveyer belt 504-1 may hold a first set of substrates 506-1 , 506-2, ... , 506-n and the second conveyer belt 504-2 may hold a second set of substrates 508-1 , 508-2, ... , 508-n.

[0052] The PVD chamber 500 may further include multiple discharging units for to discharge a depositing material onto substrates. For example, the PVD chamber 500 may include a first discharging unit 510-1 and a second discharging unit 510-2 for depositing a film of the depositing material onto the first set of substrates 506-1 , 506-2, ... , 506-n and the second set of substrates 508-1 , 508- 2, ... , 508-n.

[0053] In operation, the conveyer belt 504-1 and the conveyer belt 504-2 may allow ingress of one or more of the first set of substrates 506-1 , 506-2, ... , 506-n and the second set of substrates 508-1 , 508-2, ... , 508-n into the PVD chamber 500. The first set of openings 502-1 and 502-2 and the second set of openings 502-3 and 502-4 may be vacuum sealed, and the first discharging unit 510-1 and a second discharging unit 510-2 may discharge the depositing material in the 4 ^th and the 3 ^rd direction, respectively, to coat a film of the depositing material onto the first set of substrates 506-1 , 506-2, ... , 506-n and the second set of substrates 508-1 , 508-2, ... , 508-n

[0054] it would be noted that while two conveyer belts, the conveyer belt 504-1 and the conveyer belt 504-2, are depicted to ingress and egress the PVD chamber 500, multiple conveyer belts may be used for multi-directional PVD onto substrates. The substrates may be moved by the multiple conveyer belts into the PVD chamber and multiple discharging units may coat a film of the depositing material onto the substrates.

[0055] Although examples for the present disclosure have been described in language specific to structural features and/or methods, it should be understood that the appended claims are not necessarily limited to the specific features or methods described. Rather, the specific features and methods are disclosed and explained as examples of the present disclosure.