Title:
A MULTI-LAYER 3D DEVICE AND METHOD OF MANUFACTURING
Document Type and Number:
WIPO Patent Application WO2003036672
Kind Code:
A3
Abstract:
An apparatus suitable for three-dimensional micro-electromechanical system (MEMS) apparatus wherein features of the 3D structure contribute to functionality, and a method for assembly thereof is disclosed. The apparatus includes one or more sidewalls supporting a plurality of stacked, parallel layers in precisely fixed relative positions. Both sidewalls (110F) and layers (200a, 200e), which may be made from any of a variety of materials, may support active and inactive electronic, optical, and micro-electromechanical elements. The invention may be applied to optical switching and provides accurate alignment of optical elements through relatively precise design and manufacturing of components of the apparatus rather than by accurate positioning of individual elements. Precisely manufactured positioning elements are provided on the sidewalls (110F) for positioning layers, which are fixed thereto. The apparatus is also suitable for containing fluids between layers(200a, 200e) that may be required for their optical properties.
Inventors:
CHERTKOW IGAL (IL)
MEDINA MOSHE (IL)
KRYLOV SLAVA (IL)
KIN DAVID (IL)
MEDINA MOSHE (IL)
KRYLOV SLAVA (IL)
KIN DAVID (IL)
Application Number:
PCT/IL2002/000842
Publication Date:
March 18, 2004
Filing Date:
October 22, 2002
Export Citation:
Assignee:
MEMLINK LTD (IL)
CHERTKOW IGAL (IL)
MEDINA MOSHE (IL)
KRYLOV SLAVA (IL)
KIN DAVID (IL)
CHERTKOW IGAL (IL)
MEDINA MOSHE (IL)
KRYLOV SLAVA (IL)
KIN DAVID (IL)
International Classes:
B81B7/02; B81B7/04; G02B6/35; G02B26/08; (IPC1-7): G02B6/42; G02B26/02
Foreign References:
| US6535663B1 | 2003-03-18 | |||
| US6499006B1 | 2002-12-24 | |||
| US6059001A | 2000-05-09 |
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