Title:
MULTI-SENSOR DEVICE AND METHOD FOR MANUFACTURING MULTI-SENSOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/066929
Kind Code:
A2
Abstract:
The present invention relates to a multi-sensor device which can implement a pressure sensor function and an acceleration sensor function using one housing, and to a method for manufacturing a multi-sensor device. The multi-sensor device comprises: a lead frame; a pressure sensing element which is electrically connected to the lead frame and which can measure relative pressure between a first part and a second part; an acceleration sensor module which is electrically connected to the lead frame and can measure acceleration applied to a surrounding part; and a housing which is provided to be capable of protecting the pressure sensing element, the acceleration sensor module, and at least part of the lead frame, and in which a reference medium inlet is formed such that the pressure of a reference medium can be applied to the first part, and a target medium inlet is formed such that the pressure of a target medium can be applied to the second part.
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Inventors:
NA HYUK HWI (KR)
HWANG HO SEOK (KR)
GU JA GUEN (KR)
KANG HYANG WON (KR)
HWANG HO SEOK (KR)
GU JA GUEN (KR)
KANG HYANG WON (KR)
Application Number:
PCT/KR2017/010971
Publication Date:
April 12, 2018
Filing Date:
September 29, 2017
Export Citation:
Assignee:
ITM SEMICONDUCTOR CO LTD (KR)
International Classes:
G01D21/02; D06F37/30; D06F39/08; G01C19/56; G01D11/24
Attorney, Agent or Firm:
KIM, Nam Sik et al. (KR)
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