Title:
MULTI-STAGE VIBRATION ISOLATION SYSTEM AND METHOD FOR PRECISION INSTRUMENT
Document Type and Number:
WIPO Patent Application WO/2023/082751
Kind Code:
A1
Abstract:
A multi-stage vibration isolation system and method for a precision instrument. In the system, a first deep groove vibration isolation trench is surroundingly provided in a foundation, so that the first deep groove vibration isolation trench is used to divide the foundation into an outer foundation and an inner foundation. The precision instrument is provided on the inner foundation, and first vibration isolation media (8, 9) are filled in the first deep groove vibration isolation trench, so that vibration reduction is carried out in multiple aspects. Vibration excited by a moving member may be decoupled from low-frequency random vibration of the ground. Vibration on a main substrate (1) is reduced from a vibration source by blocking a transmission path of disturbance force of the moving member, and different high-damping vibration isolation materials are selected as the first vibration isolation media (8, 9) respectively for broadband and narrowband vibrations. The first deep groove vibration isolation trench is filled by using a series connection means, so that high-precision requirements of silicon wafer positioning is met. As such, not only is the moving member separated from the main substrate (1) by means of a vibration isolator (2), but the vibration source can also be reduced, thereby greatly reducing vibration and improving the motion positioning precision of a silicon wafer in a photoetching machine.
Inventors:
ZHANG LI (CN)
ZHOU WEI (CN)
SONG YUDUO (CN)
LU ZHIQIANG (CN)
ZHOU WEI (CN)
SONG YUDUO (CN)
LU ZHIQIANG (CN)
Application Number:
PCT/CN2022/113570
Publication Date:
May 19, 2023
Filing Date:
August 19, 2022
Export Citation:
Assignee:
BEIJING U PREC TECH CO LTD (CN)
International Classes:
E02D31/08
Foreign References:
| CN1959533A | 2007-05-09 | |||
| JP2003232050A | 2003-08-19 | |||
| CN211228586U | 2020-08-11 | |||
| CN114032969A | 2022-02-11 | |||
| CN111288104A | 2020-06-16 | |||
| CN206205009U | 2017-05-31 | |||
| CN214460680U | 2021-10-22 | |||
| JP2001311450A | 2001-11-09 | |||
| JP2002005232A | 2002-01-09 |
Attorney, Agent or Firm:
GRANDER IP LAW FIRM (CN)
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