Title:
MULTIFOCAL IMAGE ACQUISITION DEVICE AND SAMPLE SURFACE INSPECTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2018/021748
Kind Code:
A1
Abstract:
Provided are a multifocal image acquisition device and a sample surface inspection system for inspecting a sample surface. A multifocal image acquisition device according to an embodiment of the present disclosure may comprise: a first lighting unit including a plurality of first surface illuminations arranged in different directions with respect to the position where a sample is placed; a second lighting unit including a plurality of second surface illuminations disposed above the plurality of first surface illuminations, respectively; a camera which can photograph the sample from above the position where the sample is placed; and a processor for changing an illumination incident angle to the sample by sequentially turning on and off the first lighting unit and the second lighting unit and performing control such that the camera photographs the sample, so as to acquire a plurality of images having different focal lengths.
Inventors:
KIM MIN YOUNG (KR)
KIM BYEONG HAK (KR)
KIM BYEONG HAK (KR)
Application Number:
PCT/KR2017/007674
Publication Date:
February 01, 2018
Filing Date:
July 17, 2017
Export Citation:
Assignee:
KYUNGPOOK NATIONAL UNIV INDUSTRY-ACADEMIC COOPERATION FOUNDATION (KR)
International Classes:
G02B3/10; G01N21/64; G02B21/24
Foreign References:
| JP2015232483A | 2015-12-24 | |||
| KR20100122140A | 2010-11-22 | |||
| KR20160024215A | 2016-03-04 | |||
| KR20100129846A | 2010-12-10 | |||
| KR20100126941A | 2010-12-03 |
Attorney, Agent or Firm:
KIM, Tae-hun (KR)
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