Title:
MULTIFUNCTIONAL UNSYMMETRICALLY SUBSTITUTED MONOMERS AND POLYARYLENE COMPOSITIONS THEREFROM
Document Type and Number:
WIPO Patent Application WO2004089862
Kind Code:
A3
Abstract:
A monomer suitable for use in forming low dielectric constant films in semiconductor devices comprising i) two dienophile groups (A-functional groups) attached to a single aromatic ring and ii) a second ring structure comprising two conjugated carbon-to-carbon double bonds and a leaving group L (B-functional group), characterized in that said single aromatic ring is directly covalently attached to one of the double bonded carbons of the B functional group or to a fused aromatic ring containing two such double bonded carbons of the B-functional group, and one A-functional group of one monomer is capable of reaction under cycloaddition reaction conditions with the B-functional group of a second monomer to thereby form a polymer.
Inventors:
GODSCHALX JAMES P (US)
HEFNER ROBERT E JR (US)
NIU JASON Q (US)
SILVIS H CRAIG (US)
HEFNER ROBERT E JR (US)
NIU JASON Q (US)
SILVIS H CRAIG (US)
Application Number:
PCT/US2004/009973
Publication Date:
November 25, 2004
Filing Date:
April 01, 2004
Export Citation:
Assignee:
DOW GLOBAL TECHNOLOGIES INC (US)
GODSCHALX JAMES P (US)
HEFNER ROBERT E JR (US)
NIU JASON Q (US)
SILVIS H CRAIG (US)
GODSCHALX JAMES P (US)
HEFNER ROBERT E JR (US)
NIU JASON Q (US)
SILVIS H CRAIG (US)
International Classes:
C07C17/266; C07C45/29; C07C45/68; C07C45/74; C07C49/683; C07C49/753; (IPC1-7): C07C49/683; C08F38/00; C08G61/10
Domestic Patent References:
| WO2003068825A2 | 2003-08-21 |
Other References:
J. ORG. CHEM., vol. 62, no. 11, 1997, pages 3430 - 3431, XP002294396
J. ORG. CHEM., vol. 62, 1997, pages 3432 - 3433, XP002294397
J. ORG. CHEM., vol. 62, 1997, pages 3432 - 3433, XP002294397
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