Title:
MULTILAYER BODY, ELECTRONIC DEVICE AND METHOD OF PRODUCING MULTILAYER BODY
Document Type and Number:
WIPO Patent Application WO/2022/202252
Kind Code:
A1
Abstract:
A multilayer body 20 according to the present disclosure is provided with a phononic crystal layer 21 and a metal layer 22. The phononic crystal layer 21 has a plurality of recessed parts 21h. The metal layer 22 is arranged on top of or above the phononic crystal layer 21. Metal atoms of the same kind as the metal atoms contained in the metal layer 22 are present within the recessed parts 21h.
Inventors:
OHURA KOSEI
TAMBO NAOKI
TAKAHASHI KOUHEI
FUJIKANE MASAKI
TANAKA HIROYUKI
TAMBO NAOKI
TAKAHASHI KOUHEI
FUJIKANE MASAKI
TANAKA HIROYUKI
Application Number:
PCT/JP2022/009787
Publication Date:
September 29, 2022
Filing Date:
March 07, 2022
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
B32B9/00; B32B3/30; B32B15/08; G01J1/02; H01L35/32
Domestic Patent References:
| WO2020174764A1 | 2020-09-03 |
Foreign References:
| JP2018082083A | 2018-05-24 | |||
| JP2009539261A | 2009-11-12 | |||
| US20170047499A1 | 2017-02-16 | |||
| US20170069818A1 | 2017-03-09 | |||
| JP2017223644A | 2017-12-21 |
Other References:
NOMURA ET AL.: "Impeded thermal transport is Si multiscale hierarchical architectures with phononic crystal nanostructures", PHYSICAL REVIEW B, vol. 91, 2015, pages 205422
Attorney, Agent or Firm:
KAMADA Koichi et al. (JP)
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