Title:
MULTILAYER GAS BARRIER FILM AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/090579
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a multilayer gas barrier film having high gas barrier properties, and an electronic device. This multilayer gas barrier film is characterized in that at least a first gas barrier layer, an interaction layer, and a second gas barrier layer are layered in this order on a substrate, at least one of the first gas barrier layer and the second gas barrier layer has, in the thickness direction thereof, a B region containing a non-transition metal M1 and an A region containing a transition metal M2 in at least the thickness direction, and said multilayer gas barrier film comprises a mixed region that is continuous for 5 nm or more in the thickness direction and in which the value (M2/M1) of the atomic ratio of the transition metal M2 to the non-transition metal M1 is in the range of 0.02-49.
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Inventors:
YASHIRO SHINNOSUKE (JP)
MORI TAKAHIRO (JP)
MORI TAKAHIRO (JP)
Application Number:
PCT/JP2016/084530
Publication Date:
June 01, 2017
Filing Date:
November 22, 2016
Export Citation:
Assignee:
KONICA MINOLTA INC (JP)
International Classes:
B32B9/00; C23C14/08; H01L51/50; H05B33/02; H05B33/04
Foreign References:
| JP2010511267A | 2010-04-08 | |||
| JP2005035128A | 2005-02-10 | |||
| JP2008275737A | 2008-11-13 | |||
| JP2004322382A | 2004-11-18 |
Attorney, Agent or Firm:
KOYO INTERNATIONAL PATENT FIRM (JP)
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