Title:
MULTILAYER OBJECT AND RELEASE AGENT COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2021/166905
Kind Code:
A1
Abstract:
A multilayer object comprising a first base, which comprises a semiconductor substrate, a second base, which comprises a light-transmitting supporting substrate, and an adhesive layer and a release layer which are disposed between the first base and the second base, characterized in that the release layer is a film obtained from a release agent composition comprising a polynuclear phenol derivative represented by formula (P), a crosslinking agent, and an acid generator and/or an acid. (In the formula, Ar represents an arylene group.)
Inventors:
OGATA HIROTO (JP)
SHINJO TETSUYA (JP)
SHINJO TETSUYA (JP)
Application Number:
PCT/JP2021/005699
Publication Date:
August 26, 2021
Filing Date:
February 16, 2021
Export Citation:
Assignee:
NISSAN CHEMICAL CORP (JP)
International Classes:
C09J183/04; C09J201/00; C09K3/00; H01L21/02; H01L21/304; H01L21/683
Foreign References:
| JP2008216530A | 2008-09-18 | |||
| JP2012503046A | 2012-02-02 | |||
| US4737389A | 1988-04-12 | |||
| JP2004064040A | 2004-02-26 | |||
| JP2012106486A | 2012-06-07 |
Other References:
See also references of EP 4108733A4
Attorney, Agent or Firm:
KURIHARA, Hiroyuki et al. (JP)
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