Title:
MULTILAYER SUBSTRATE WITH PIEZOELECTRIC THIN FILM, PIEZOELECTRIC THIN FILM ELEMENT AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2017/065133
Kind Code:
A1
Abstract:
This multilayer substrate with a piezoelectric thin film is provided with: a substrate; an electrode film formed on the substrate; and a piezoelectric thin film formed on the electrode film. The piezoelectric thin film is obtained by preferentially orienting a perovskite alkali niobium oxide represented by composition formula (K1-xNax)NbO3 (wherein 0 < x < 1) in the (001) plane direction, and contains a metal element selected from the group consisting of Mn and Cu at a concentration of from 0.2 at% to 0.6 at% (inclusive).
Inventors:
SHIBATA KENJI (JP)
WATANABE KAZUTOSHI (JP)
HORIKIRI FUMIMASA (JP)
WATANABE KAZUTOSHI (JP)
HORIKIRI FUMIMASA (JP)
Application Number:
PCT/JP2016/080105
Publication Date:
April 20, 2017
Filing Date:
October 11, 2016
Export Citation:
Assignee:
SCIOCS CO LTD (JP)
SUMITOMO CHEMICAL CO (JP)
SUMITOMO CHEMICAL CO (JP)
International Classes:
H01L41/187; C01G33/00; C23C14/08; H01L41/316; H01L41/332
Foreign References:
| JP2014229902A | 2014-12-08 | |||
| JP2013038322A | 2013-02-21 | |||
| JP2013251355A | 2013-12-12 |
Other References:
See also references of EP 3364471A4
Attorney, Agent or Firm:
FUKUOKA Masahiro et al. (JP)
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