Title:
NANO PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2021/246595
Kind Code:
A1
Abstract:
One embodiment of the present invention relates to a nano-piezoelectric element. According to one embodiment of the present invention, provided is a nano-piezoelectric element, comprising: a carbon layer formed of graphene having a honeycomb planar structure in which carbon atoms are connected to each other; one or more nanostructures vertically grown on one surface of the carbon layer; a first electrode disposed on the one or more nanostructures; a second electrode disposed on the other surface of the carbon layer; and an insulator filled between the first electrode and the second electrode.
Inventors:
LEE GYU CHUL (KR)
SONG MIN HO (KR)
PARK JUN BEOM (KR)
SONG MIN HO (KR)
PARK JUN BEOM (KR)
Application Number:
PCT/KR2020/017136
Publication Date:
December 09, 2021
Filing Date:
November 27, 2020
Export Citation:
Assignee:
SEOUL NAT UNIV R&DB FOUNDATION (KR)
International Classes:
H01L41/047; H01L41/193; H01L41/25; H01L41/29; H01L41/35
Foreign References:
US20120319218A1 | 2012-12-20 | |||
KR20110021637A | 2011-03-04 | |||
JP4971393B2 | 2012-07-11 | |||
KR20100019297A | 2010-02-18 | |||
KR100643083B1 | 2006-11-10 |
Attorney, Agent or Firm:
DOOHO IP LAW FIRM (KR)
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