Title:
NANOGAP ELECTRODE, METHOD FOR PRODUCING SAME AND NANODEVICE HAVING NANOGAP ELECTRODE
Document Type and Number:
WIPO Patent Application WO/2019/168123
Kind Code:
A1
Abstract:
This nanogap electrode comprises: a first electrode which has a first electrode layer and a first metal particle that is arranged on one end of the first electrode layer; and a second electrode which has a second electrode layer and a second metal particle that is arranged on one end of the second electrode layer. The first metal particle and the second metal particle are arranged so as to face each other at a distance; the maximum width from one end to the other end of the first metal particle and the second metal particle is 10 nm or less; and the distance between the first metal particle and the second metal particle is 10 nm or less.
Inventors:
MAJIMA YUTAKA (JP)
CHOI YOONYOUNG (JP)
KWON AIN (JP)
CHOI YOONYOUNG (JP)
KWON AIN (JP)
Application Number:
PCT/JP2019/007937
Publication Date:
September 06, 2019
Filing Date:
February 28, 2019
Export Citation:
Assignee:
JAPAN SCIENCE & TECH AGENCY (JP)
International Classes:
H01L27/10; B82Y10/00; B82Y40/00; C23C18/42; H01L21/28; H01L21/288; H01L21/8239; H01L27/105; H01L29/06; H01L29/66; H01L45/00; H01L49/00
Domestic Patent References:
| WO2017013256A1 | 2017-01-26 | |||
| WO2016031836A1 | 2016-03-03 | |||
| WO2014142040A1 | 2014-09-18 |
Foreign References:
| JP2006278550A | 2006-10-12 | |||
| JP2006265648A | 2006-10-05 |
Attorney, Agent or Firm:
TAKAHASHI, HAYASHI AND PARTNER PATENT ATTORNEYS, INC. (JP)
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