Title:
NANOIMPRINT REPLICA MOLD, MANUFACTURING METHOD THEREFOR, AND NANOIMPRINT REPLICA MOLD MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/009026
Kind Code:
A1
Abstract:
Disclosed are a nanoimprint replica mold, a manufacturing method therefor, and a nanoimprint replica mold manufacturing device. The nanoimprint replica mold of the present invention comprises: a base made of a plastic film; a stamping unit formed in the base; and a guide film separably formed in the base, having a hollow portion such that the stamping unit can be exposed, and having particles formed by the spreading and curing of the outer circumferential surface of the stamping unit, wherein the stamping unit is made of resin and has an uneven shape pattern.
Inventors:
KWON SANG MIN (KR)
GU JA BUNG (KR)
KOO HWANG SUB (KR)
KIM HYUN JE (KR)
JUNG HEE SEOK (KR)
GU JA BUNG (KR)
KOO HWANG SUB (KR)
KIM HYUN JE (KR)
JUNG HEE SEOK (KR)
Application Number:
PCT/KR2017/007306
Publication Date:
January 11, 2018
Filing Date:
July 07, 2017
Export Citation:
Assignee:
GIGALANE CO LTD (KR)
International Classes:
G03F7/16; B29C33/60; B29C35/08; B29C43/02; B82B3/00; G03F7/00; G03F7/20; H01L21/027; H01L29/06
Domestic Patent References:
| WO2016103653A1 | 2016-06-30 |
Foreign References:
| JP2010000719A | 2010-01-07 | |||
| JPH1120391A | 1999-01-26 | |||
| KR20150079055A | 2015-07-08 | |||
| KR20150048549A | 2015-05-07 |
Attorney, Agent or Firm:
OH, Uk (KR)
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