Title:
NANOTWINNED CRYSTAL COPPER MICROINDUCTOR, AND PREPARATION METHOD THEREFOR AND APPLICATION THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/151389
Kind Code:
A1
Abstract:
A nanotwinned crystal copper microinductor, and a preparation method therefor and an application thereof, relating to the technical filed of microelectronic devices. Provided is a nanotwinned crystal copper microinductor. A coil structure of the nanotwinned crystal copper microinductor is a double-layer structure comprising a bottom layer and a top layer, the bottom layer is nanotwinned crystal copper of a planar circuit, and the top layer is a combination of the planar circuit and a longitudinal post. The microstructure of the nanotwinned crystal copper is columnar crystal, the columnar crystal has a crystal grain diameter of 1-6 µm and a length of 2-50 µm, twinned crystal sheet layers are present inside the columnar crystal, and the spacing of the twinned crystal sheet layers is 5-100 nm. Also provided are a preparation method for the nanotwinned crystal copper microinductor and an application of the nanotwinned crystal copper microinductor. The flattening of the bottom-layer coil is ensured by using a chemical mechanical polishing method. The top-layer coil uses the optimized electrodeposition formula and process, and two graphics, i.e., the planar circuit and the longitudinal post, can be filled at the same time. Electrodeposition of a post portion of the top-layer coil using the material of the bottom-layer coil as a matrix can eliminate a transition layer, a crystal face diffuses rapidly, and the bonding is good.
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Inventors:
GAO LIYIN (CN)
LIU ZHIQUAN (CN)
SUN RONG (CN)
LIU ZHIQUAN (CN)
SUN RONG (CN)
Application Number:
PCT/CN2022/140101
Publication Date:
August 17, 2023
Filing Date:
December 19, 2022
Export Citation:
Assignee:
SHENZHEN INST OF ADV TECH CAS (CN)
International Classes:
H01F27/28; H01F41/071
Foreign References:
| CN107331656A | 2017-11-07 | |||
| CN113454766A | 2021-09-28 | |||
| CN102789967A | 2012-11-21 | |||
| CN103325765A | 2013-09-25 | |||
| CN1635637A | 2005-07-06 | |||
| US20130033347A1 | 2013-02-07 |
Attorney, Agent or Firm:
BEIJING ZHONG XUN TONG DA INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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