Title:
NEGATIVE ION GENERATION DEVICE AND NEGATIVE ION GENERATION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/132344
Kind Code:
A1
Abstract:
This negative ion generation device generates negative ions and irradiates an object with the negative ions, and is provided with a chamber in which the negative ions are generated, a negative ion generation unit which generates the negative ions by generating plasma in the chamber, and a voltage application unit which is able to apply bias voltage to the object. The voltage application unit has a power source capable of applying a high-frequency voltage signal.
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Inventors:
KITAMI HISASHI (JP)
MAEHARA MAKOTO (JP)
KINOSHITA KIMIO (JP)
MAEHARA MAKOTO (JP)
KINOSHITA KIMIO (JP)
Application Number:
PCT/JP2020/048194
Publication Date:
July 01, 2021
Filing Date:
December 23, 2020
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
H01J27/02; H01J37/08; H05H1/24
Foreign References:
| JPH09289193A | 1997-11-04 | |||
| US20100248488A1 | 2010-09-30 | |||
| JP2011222860A | 2011-11-04 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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