Title:
NITRIDING APPARATUS AND NITRIDING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/080058
Kind Code:
A1
Abstract:
The present invention provides a nitriding apparatus and a nitriding method, which are capable of suppressing the generation of a compound layer by measuring the temperature of an object to be nitrided with high accuracy. A nitriding apparatus (1) according to the present invention is provided with a chamber (10), a gas supply unit (50), a supporting body (20), a plasma generation source (30), a heater (70), a thermocouple strand (61) that comprises a temperature measurement part (61S), a housing member (60), a power supply (41) for objects to be nitrided, and a treatment condition control unit (80). The housing member internally contains the thermocouple strand so as to cover the temperature measurement part, while being insulated from the thermocouple strand. The power supply for objects to be nitrided applies a predetermined voltage to an object (W) to be nitrided and the housing member so that the object to be nitrided and the housing member are set to the same negative potential.
Inventors:
ABE MAIKO
AKARI KOICHIRO
AKARI KOICHIRO
Application Number:
PCT/JP2019/037864
Publication Date:
April 23, 2020
Filing Date:
September 26, 2019
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
International Classes:
C23C8/36
Foreign References:
| JP2006249508A | 2006-09-21 | |||
| JP2008255405A | 2008-10-23 | |||
| JPS5693873A | 1981-07-29 | |||
| JPS5154843A | 1976-05-14 | |||
| JPS491441A | 1974-01-08 | |||
| JP2009091615A | 2009-04-30 | |||
| JP2016196696A | 2016-11-24 | |||
| JP2931173B2 | 1999-08-09 | |||
| JP4042962B2 | 2008-02-06 |
Attorney, Agent or Firm:
KOTANI, Etsuji et al. (JP)
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