Title:
NON-OXIDIZING ELECTRODE ARRANGEMENT FOR EXCIMER LAMPS
Document Type and Number:
WIPO Patent Application WO2004107478
Kind Code:
A3
Abstract:
A non-oxidizing electrode arrangement for an excimer lamp that is formed by coating an electrode of the lamp with a layer of protective layer that prevents the electrode from oxidizing. The protective layer is preferably transparent and possesses a low permeability for oxygen (e.g., silicon oxide, magnesium fluoride, calcium fluoride). The interior of the excimer lamp is evacuated to a pressure level that is lower than the pressure level surrounding the excimer lamp at any time during the non-oxidizing electrode formation process in order to assist in preventing the excimer lamp from fracturing.
Inventors:
CLAUS HOLGER (US)
FALKENSTEIN ZORAN (US)
FALKENSTEIN ZORAN (US)
Application Number:
PCT/US2004/017218
Publication Date:
August 18, 2005
Filing Date:
May 28, 2004
Export Citation:
Assignee:
USHIO AMERICA INC (US)
CLAUS HOLGER (US)
FALKENSTEIN ZORAN (US)
CLAUS HOLGER (US)
FALKENSTEIN ZORAN (US)
International Classes:
H01J11/00; H01J17/16; H01J65/00; H01M; (IPC1-7): H01J11/00; H01J65/00
Foreign References:
| US4837484A | 1989-06-06 | |||
| US5397259A | 1995-03-14 | |||
| US20020117959A1 | 2002-08-29 | |||
| US5849107A | 1998-12-15 | |||
| US5581152A | 1996-12-03 | |||
| US5763999A | 1998-06-09 | |||
| US6525451B1 | 2003-02-25 |
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