Title:
NONCONTACT ROTATING PROCESSOR
Document Type and Number:
WIPO Patent Application WO/2007/069433
Kind Code:
A1
Abstract:
[PROBLEMS] To provide a noncontact apparatus for performing rotating process to
a subject to be processed, without contaminating environment in an airtight container.
[MEANS FOR SOLVING PROBLEMS] A spin head (1) is held on a holding table (7) in an
airtight container, a pinning force is generated between a spin head (1) and a
second kind superconductor (11), a spin head (1) is floated by lifting the second
kind superconductor (11) by a lifting means (22). Then, rotating force generated
by a noncontact rotating power transmitting body (18) arranged at the internal
center of the second type superconductor (11) is subsequently generated on the
side of a spin head (1), and the spin head (1) is rotated in conjunction with a driving
motor (19).
Inventors:
FUKUI SATOSHI (JP)
OGAWA JUN (JP)
YAMAGUCHI MITSUGI (JP)
OKA TETSUO (JP)
SASAHARA TOMOE (JP)
MIYAZAKI SHINSUKE (JP)
OGAWA JUN (JP)
YAMAGUCHI MITSUGI (JP)
OKA TETSUO (JP)
SASAHARA TOMOE (JP)
MIYAZAKI SHINSUKE (JP)
Application Number:
PCT/JP2006/323250
Publication Date:
June 21, 2007
Filing Date:
November 21, 2006
Export Citation:
Assignee:
UNIV NIIGATA (JP)
MTC CO LTD (JP)
FUKUI SATOSHI (JP)
OGAWA JUN (JP)
YAMAGUCHI MITSUGI (JP)
OKA TETSUO (JP)
SASAHARA TOMOE (JP)
MIYAZAKI SHINSUKE (JP)
MTC CO LTD (JP)
FUKUI SATOSHI (JP)
OGAWA JUN (JP)
YAMAGUCHI MITSUGI (JP)
OKA TETSUO (JP)
SASAHARA TOMOE (JP)
MIYAZAKI SHINSUKE (JP)
International Classes:
H02K29/06; F16C32/04; H02K55/02
Foreign References:
| JP2002239443A | 2002-08-27 | |||
| JP2003126755A | 2003-05-07 | |||
| JP2004511902A | 2004-04-15 | |||
| JPH08296648A | 1996-11-12 | |||
| JP2002005265A | 2002-01-09 |
Attorney, Agent or Firm:
OGAWA, Shin-ichi et al. (Noguchi & Saika International Patent Office 37 Kowa Building, 4-5, Tsukiji 1-chom, Chuo-ku Tokyo 45, JP)
Download PDF: