Title:
NOVEL AMIDINATE LIGAND, AND THIN FILM FORMATION PRECURSOR COMPRISING LIGAND
Document Type and Number:
WIPO Patent Application WO/2024/049037
Kind Code:
A1
Abstract:
The present invention relates to an amidinate ligand represented by chemical formula 1, and a thin film formation precursor comprising the ligand, and, to: a novel amidinate ligand capable of exhibiting chemical properties such as high structural stability, low viscosity, high volatility, high heat resistance and a room-temperature liquid form of a precursor; and a thin film formation precursor comprising the ligand.
Inventors:
KIM HAN BYUL (KR)
OH HAN SOL (KR)
PARK YONG JOO (KR)
NOH YUN SU (KR)
LEE SANG KYUNG (KR)
OH HAN SOL (KR)
PARK YONG JOO (KR)
NOH YUN SU (KR)
LEE SANG KYUNG (KR)
Application Number:
PCT/KR2023/011544
Publication Date:
March 07, 2024
Filing Date:
August 07, 2023
Export Citation:
Assignee:
SK TRI CHEM CO LTD (KR)
International Classes:
C07C211/22; C23C16/18; C23C16/34; C23C16/40
Domestic Patent References:
| WO2009068454A1 | 2009-06-04 |
Foreign References:
| US20160315168A1 | 2016-10-27 | |||
| US20170152144A1 | 2017-06-01 | |||
| KR20210084297A | 2021-07-07 |
Other References:
ELETER MOHAMAD, DANIELE STEPHANE, BRIZE VIRGINIE, DUBOURDIEU CATHERINE, LACHAUD CHRISTOPHE, BLASCO NICOLAS, PINCHART AUDREY: "Remarkable Influence of molecular structure of N,N'-unsymmetrically substituted 1,3-amidinate and -guanidinate on the Volatility and the Thermal Stability of Precursors for HfO 2 Films via Liquid Injection-MOCVD", ECS TRANSACTIONS, ELECTROCHEMICAL SOCIETY, US, vol. 25, no. 8, 25 September 2009 (2009-09-25), US , pages 151 - 158, XP093144976, ISSN: 1938-5862, DOI: 10.1149/1.3207586
Attorney, Agent or Firm:
LEE, Byong Jin (KR)
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