NOVEL FLUOROPOLYMER, RESIST COMPOSITIONS CONTAINING THE SAME, AND NOVEL FLUOROMONOMERS

Title:

NOVEL FLUOROPOLYMER, RESIST COMPOSITIONS CONTAINING THE SAME, AND NOVEL FLUOROMONOMERS

Document Type and Number:

WIPO Patent Application WO/2003/031487

Kind Code:

A1

Abstract:

A fluorocopolymer having aliphatic monocyclic structures in the backbone chain, as represented by the general formula (Ma): − (M1) − (M2a) − (N) − (Ma) wherein structural unit (M1) is a unit derived from an ethylenic monomer having two or three carbon atoms and at least one fluorine atom&semi structural unit (M2a) is at least one kind of unit represented by the general formula (a) and forming an aliphatic monocyclic structure in the backbone chain: (a) [wherein R¹ is at least one group selected from among divalent hydrocarbon groups which each have one to eight ring−constituting carbon atoms and may be substituted with hydrocarbyl or fluoroalkyl, and divalent hydrocarbon groups which each have an ether linkage with the sum of ring−constituting carbon and oxygen atoms ranging from 2 to 8 and may be substituted with hydrocarbyl or fluoroalkyl&semi R²is alkylene having one to three ring−constituting carbon atoms&semi R³ and R⁴ are each independently alkylene having one or two carbon atoms&semi and n1, n2, and n3 are each independently 0 or 1]&semi and structural unit (N) is a unit derived from a monomer copolymerizable with structural units (M1) and (M2a), which comprises 1 to 99 mole % of structural units (M1), 1 to 99 mole % of structural units (M2a) and 0 to 98 mole % of structural units (N) and has a number−average molecular weight of 500 to 1000000. This fluorocopolymer exhibits excellent dry etching resistance and transparency in the vacuum ultraviolet region.

Inventors:

ARAKI TAKAYUKI (JP)
ISHIKAWA TAKUJI (JP)
KOH MEITEN (JP)

Application Number:

PCT/JP2002/010242

Publication Date:

April 17, 2003

Filing Date:

October 02, 2002

Export Citation:

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Assignee:

DAIKIN IND LTD (JP)
ARAKI TAKAYUKI (JP)
ISHIKAWA TAKUJI (JP)
KOH MEITEN (JP)

International Classes:

C07C31/38; C07C33/42; C07C33/44; C07C35/52; C08F214/18; G03F7/004; G03F7/038; G03F7/039; (IPC1-7): C08F214/18; C07C33/44; C07C57/56; C07C35/48

Foreign References:

JP2001356480A	2001-12-26
JPH10231329A	1998-09-02

Other References: