Title:
NOVEL ORGANOMETALLIC COMPOUND, METHOD FOR PREPARING SAME, AND METHOD FOR PREPARING THIN FILM USING SAME
Document Type and Number:
WIPO Patent Application WO/2023/080505
Kind Code:
A1
Abstract:
The present invention relates to an organometallic compound, a method for preparing same, and a method for preparing a thin film using same and, more specifically, to an organometallic compound, a method for preparing same, and a method for preparing a thin film using same, in which, in preparing a thin film through chemical vapor deposition or a solution process, the organometallic compound has improved thermal stability and volatility and can easily prepare a high-quality metallic thin film or metallic oxide thin film at a low temperature.
Inventors:
CHUNG TAEK MO (KR)
RYU JI YEON (KR)
PARK CHAN WOO (KR)
PARK BO KEUN (KR)
KIM CHANG GYOUN (KR)
EOM TAE YONG (KR)
RYU JI YEON (KR)
PARK CHAN WOO (KR)
PARK BO KEUN (KR)
KIM CHANG GYOUN (KR)
EOM TAE YONG (KR)
Application Number:
PCT/KR2022/016135
Publication Date:
May 11, 2023
Filing Date:
October 21, 2022
Export Citation:
Assignee:
KOREA RES INST CHEMICAL TECH (KR)
International Classes:
C07F3/00; C23C16/18; C23C16/40; C23C16/455
Foreign References:
| KR20130123918A | 2013-11-13 | |||
| US20080286464A1 | 2008-11-20 | |||
| US20050022738A1 | 2005-02-03 | |||
| KR101769338B1 | 2017-08-30 | |||
| US6210752B1 | 2001-04-03 |
Attorney, Agent or Firm:
GHONG-GAN INTERNATIONAL PATENT LAW FIRM (KR)
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