Title:
NOVEL POLYMER AND PRODUCTION OF NANO-POROUS LOW DIELECTRIC POLYMER COMPOSITE FILM USING THE SAME
Document Type and Number:
WIPO Patent Application WO2004113407
Kind Code:
A9
Abstract:
A star-shaped polymer having an alkoxy silane end group and containing an ether group at the center thereof, which is represented by formula (I), is useful as a pore introducer to obtain a low dielectric silicate polymer film having nano-pores distributed regularly and evenly. The star-shaped polymer is prepared by comprising conducting a ring open polymerization of a cyclic monomer and a polyhydric alcohol, and reacting the resulting polymer with an alkoxy silane compound.
Inventors:
REE MOONHOR (KR)
OH WEONTAE (KR)
HWANG YONGTAEK (KR)
LEE BYEONGDU (KR)
OH WEONTAE (KR)
HWANG YONGTAEK (KR)
LEE BYEONGDU (KR)
Application Number:
PCT/KR2004/000316
Publication Date:
March 30, 2006
Filing Date:
February 17, 2004
Export Citation:
Assignee:
POSTECH FOUNDATION (KR)
REE MOONHOR (KR)
OH WEONTAE (KR)
HWANG YONGTAEK (KR)
LEE BYEONGDU (KR)
REE MOONHOR (KR)
OH WEONTAE (KR)
HWANG YONGTAEK (KR)
LEE BYEONGDU (KR)
International Classes:
C08F283/00; C08F283/06; C08F283/12; C08G65/336; (IPC1-7): C08F283/00; C08G77/48; C09D183/04
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