Title:
ONIUM SALT, PHOTOACID GENERATOR, PHOTOSENSITIVE RESIN COMPOSITION, AND METHOD FOR PRODUCING DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/174471
Kind Code:
A1
Abstract:
An onium salt represented by formula (a). Z-A-W-Y+(R)nX- (a) (In formula (a), Z, A, W, Y, (R)n, and X have the following meanings: Z represents a monovalent organic group having a ring structure provided with a conjugated π electron system which may have one or more substituent groups; W represents a divalent organic group having a ring structure provided with a conjugated π electron system which may have one or more substituent groups; A represents a divalent linking group containing a direct coupling or one or more bonds selected from a group consisting of a carbon-carbon single bond, a carbon-carbon double bond, and a carbon-carbon triple bond (any Z and/or W substituent group may form a ring structure in which one or more atoms included in Z and/or W are saturated or partially saturated together with A); Y is an iodine or sulfur atom, n=1 when Y is an iodine atom, and n=2 when Y is a sulfur atom; (R)n may be identical to or different from one another, and each (R)n is a monovalent organic group having a carbon number of 1 or more which may have a substituent group; and X is a monovalent anion.)
Inventors:
MIYAZAWA TAKASHI (JP)
Application Number:
PCT/JP2015/063830
Publication Date:
November 19, 2015
Filing Date:
May 13, 2015
Export Citation:
Assignee:
TOYO GOSEI CO LTD (JP)
International Classes:
C07C381/12; C07C309/06; C09K3/00; G03F7/004; G03F7/039; H01L21/027
Foreign References:
| CN102141731A | 2011-08-03 | |||
| CN101943862A | 2011-01-12 | |||
| CN101930174A | 2010-12-29 | |||
| CN103012227A | 2013-04-03 | |||
| JPH07502348A | 1995-03-09 | |||
| JPH04502374A | 1992-04-23 | |||
| US5089374A | 1992-02-18 | |||
| JPH0924678A | 1997-01-28 |
Other References:
MING JIN ET AL.: "Design of D-n-A type photoacid generators for high efficiency excitation at 405 nm and 800 nm", CHEMICAL COMMUNICATIONS, vol. 49, no. 76, 2013, pages 8480 - 8482
JUNPING LI ET AL.: "A photometric method for measuring photoacid generator efficiencies using rhodamine b as acid sensor in thin polymer films", KEY ENGINEERING MATERIALS, vol. 373, no. 374, 2008, pages 686 - 689
MEI-LI WANG ET AL.: "Studies on synthesis of sulfonium salts and their properties as photoacid generators", YINGXIANG KEXUE YU GUANG HUAXUE, vol. 26, no. 2, 2008, pages 88 - 93
RONGJIE XIA ET AL.: "Enhancement of Acid Photogeneration Through a Para-to-Meta Substitution Strategy in a Sulfonium-Based Alkoxystilbene Designed for Two-Photon Polymerization", CHEMISTRY OF MATERIALS, vol. 24, no. 2, 2012, pages 237 - 244
WEI-MIN ZHANG ET AL.: "Violet sensitive acid generator and its photoacid generation efficiency, ICIS '06", INTERNATIONAL CONGRESS OF IMAGING SCIENCE , FINAL PROGRAM AND PROCEEDINGS, 2006, pages 604 - 606
FRANKLIN D. SAEVA ET AL.: "Intramolecular photoinduced electron transfer (PET) bond cleavage in some sulfonium salt derivatives. Effect of distance and thermodynamics on PET rate", JOURNAL OF PHYSICAL ORGANIC CHEMISTRY, vol. 6, no. 6, 1993, pages 334 - 340
F. D. SAEVA ET AL.: "Comparative photochemical behavior of some anthracenyl and naphthacenyl sulfonium salt derivatives", JOURNAL OF PHOTOCHEMISTRY AND PHOTOBIOLOGY, A: CHEMISTRY, vol. 86, no. 1-3, 1995, pages 149 - 154, XP002597667, DOI: doi:10.1016/1010-6030(94)03923-I
ROYMON JOSEPH ET AL.: "Atropisomerization in Confined Space; Cucurbiturils as Tools to Determine the Torsional Barrier of Substituted Biphenyls", EUR. J. ORG. CHEM., 13 November 2013 (2013-11-13), pages 105 - 110
ROYMON JOSEPH ET AL.: "Subtle ''supramolecular buttressing effects'' in Cucurbit[7]uril/guest assemblies", ORGANIC & BIOMOLECULAR CHEMISTRY, vol. 11, no. 19, 2013, pages 3116 - 3127
DAVID H. THOMPSON ET AL.: "Photosensitive liposomes as potential targeted therapeutic agents", NANOPARTICULATE DRUG DELIVERY SYSTEMS, 2013, pages 81 - 99
JUNPING LI ET AL.: "A photometric method for measuring photoacid generator efficiencies using rhodamine b as acid sensor in thin polymer films", KEY ENGINEERING MATERIALS, vol. 373, no. 374, 2008, pages 686 - 689
MEI-LI WANG ET AL.: "Studies on synthesis of sulfonium salts and their properties as photoacid generators", YINGXIANG KEXUE YU GUANG HUAXUE, vol. 26, no. 2, 2008, pages 88 - 93
RONGJIE XIA ET AL.: "Enhancement of Acid Photogeneration Through a Para-to-Meta Substitution Strategy in a Sulfonium-Based Alkoxystilbene Designed for Two-Photon Polymerization", CHEMISTRY OF MATERIALS, vol. 24, no. 2, 2012, pages 237 - 244
WEI-MIN ZHANG ET AL.: "Violet sensitive acid generator and its photoacid generation efficiency, ICIS '06", INTERNATIONAL CONGRESS OF IMAGING SCIENCE , FINAL PROGRAM AND PROCEEDINGS, 2006, pages 604 - 606
FRANKLIN D. SAEVA ET AL.: "Intramolecular photoinduced electron transfer (PET) bond cleavage in some sulfonium salt derivatives. Effect of distance and thermodynamics on PET rate", JOURNAL OF PHYSICAL ORGANIC CHEMISTRY, vol. 6, no. 6, 1993, pages 334 - 340
F. D. SAEVA ET AL.: "Comparative photochemical behavior of some anthracenyl and naphthacenyl sulfonium salt derivatives", JOURNAL OF PHOTOCHEMISTRY AND PHOTOBIOLOGY, A: CHEMISTRY, vol. 86, no. 1-3, 1995, pages 149 - 154, XP002597667, DOI: doi:10.1016/1010-6030(94)03923-I
ROYMON JOSEPH ET AL.: "Atropisomerization in Confined Space; Cucurbiturils as Tools to Determine the Torsional Barrier of Substituted Biphenyls", EUR. J. ORG. CHEM., 13 November 2013 (2013-11-13), pages 105 - 110
ROYMON JOSEPH ET AL.: "Subtle ''supramolecular buttressing effects'' in Cucurbit[7]uril/guest assemblies", ORGANIC & BIOMOLECULAR CHEMISTRY, vol. 11, no. 19, 2013, pages 3116 - 3127
DAVID H. THOMPSON ET AL.: "Photosensitive liposomes as potential targeted therapeutic agents", NANOPARTICULATE DRUG DELIVERY SYSTEMS, 2013, pages 81 - 99
Attorney, Agent or Firm:
KURIHARA, HIROYUKI (JP)
Hiroyuki Kurihara (JP)
Hiroyuki Kurihara (JP)
Download PDF: