Title:
OPC DETECTION METHOD, COMPUTER DEVICE AND COMPUTER-READABLE STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2022/267835
Kind Code:
A1
Abstract:
An OPC detection method, a computer device, and a computer-readable storage medium. Once rounding processing is performed on a second target pattern, the obtained rounded pattern is closer to the pattern of an actual silicon wafer, which may reduce false error reporting caused by differences between the obtained rounded pattern and the pattern of the actual silicon wafer; and an enclosure rate is detected by means of a logical NOT operation between a first simulated pattern and a second rounded pattern, which may further reduce false error reporting during enclosure rate checking so as to obtain more accurate result patterns of OPC detection.
Inventors:
XIA GUOSHUAI (CN)
Application Number:
PCT/CN2022/095967
Publication Date:
December 29, 2022
Filing Date:
May 30, 2022
Export Citation:
Assignee:
GTA SEMICONDUCTOR CO LTD (CN)
International Classes:
G03F1/36
Foreign References:
| CN113376954A | 2021-09-10 | |||
| CN108803233A | 2018-11-13 | |||
| CN104865788A | 2015-08-26 | |||
| CN105353586A | 2016-02-24 | |||
| CN111338180A | 2020-06-26 | |||
| CN103885282A | 2014-06-25 | |||
| CN108681205A | 2018-10-19 | |||
| US20030134205A1 | 2003-07-17 |
Attorney, Agent or Firm:
J.Z.M.C. PATENT AND TRADEMARK LAW OFFICE (GENERAL PARTNERSHIP) (CN)
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