OPTICAL CORRECTION COEFFICIENT PREDICTION METHOD, OPTICAL CORRECTION COEFFICIENT PREDICTION DEVICE, MACHINE LEARNING METHOD, MACHINE LEARNING PREPROCESSING METHOD, AND TRAINED LEARNING MODEL

Title:

OPTICAL CORRECTION COEFFICIENT PREDICTION METHOD, OPTICAL CORRECTION COEFFICIENT PREDICTION DEVICE, MACHINE LEARNING METHOD, MACHINE LEARNING PREPROCESSING METHOD, AND TRAINED LEARNING MODEL

Document Type and Number:

WIPO Patent Application WO/2022/219864

Kind Code:

A1

Abstract:

In this invention, a control device 11 comprises an acquisition unit 201 for acquiring an intensity distribution along a prescribed direction for an intensity image obtained by observing the effect produced by light that has been corrected using a spatial light modulator 9 on the basis of Zernike coefficients, a generation unit 202 for calculating a comparison result for the intensity distribution and a target distribution and generating comparison data, and a prediction unit 204 for inputting the Zernike coefficients that resulted in the intensity distribution and the comparison data into a learning model 207 and thereby predicting Zernike coefficients for correcting optical aberration such that the intensity distribution approaches the target distribution.

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Inventors:

FUKUHARA MASASHI (JP)
HASHIMOTO YU (JP)
SUZUKI KAZUYA (JP)
HYODO TOMOKO (JP)

Application Number:

PCT/JP2022/000953

Publication Date:

October 20, 2022

Filing Date:

January 13, 2022

Export Citation:

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Assignee:

HAMAMATSU PHOTONICS KK (JP)

International Classes:

G01M11/02; G02B21/06; G02B21/36; G06N20/00

Domestic Patent References:

WO2013172085A1

2013-11-21

Foreign References:

JP2003121749A	2003-04-23
JP2014026083A	2014-02-06
US20210072570A1	2021-03-11
CN111507049A	2020-08-07

Attorney, Agent or Firm:

HASEGAWA Yoshiki et al. (JP)

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