Title:
OPTICAL DETECTION DEVICE, OPTICAL DETECTION METHOD, METHOD FOR DESIGNING OPTICAL DETECTION DEVICE, SAMPLE CLASSIFICATION METHOD, AND DEFECT DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2020/203592
Kind Code:
A1
Abstract:
An optical detection device (10) is for detecting desired wavelength components which are contained in an input beam, the device comprising: a spectrometer that is constituted by a diffraction grating (16) or the like and that receives the input beam as an input and outputs, in a row, multiple copies of the optical spectrum of the input beam; a second slit array (18) that has a row of three or more slits for transmitting beams of wavelength components at three or more points with respect to the rows of the multiple optical spectra outputted from the spectrometer; and an imaging element (19) that is constituted by a row of pixels and receives the beams of three or more wavelength components transmitted by the second slit array (18). At least two or more pitches in the row of three or more slits of the second slit array (18) are different.
Inventors:
KONISHI TSUYOSHI (JP)
Application Number:
PCT/JP2020/013495
Publication Date:
October 08, 2020
Filing Date:
March 25, 2020
Export Citation:
Assignee:
UNIV OSAKA (JP)
International Classes:
G01J3/04; G01J3/36
Domestic Patent References:
| WO2014141666A1 | 2014-09-18 |
Foreign References:
| US20050031259A1 | 2005-02-10 | |||
| JP2012181098A | 2012-09-20 |
Other References:
VIDAL, B ET AL.: "Harmonic Suppressed Photonic Microwave Filter", JOURNAL OF LIGHTWAVE TECHNOLOGY, vol. 21, no. 12, 2003, pages 3150 - 3154, XP001244564, DOI: 10.1109/JLT.2003.822255
Attorney, Agent or Firm:
NII, Hiromori (JP)
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