Title:
OPTICAL DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/203811
Kind Code:
A1
Abstract:
[Problem] To suppress the diffusion of impurities from the pixel boundary side to a photoelectric conversion unit, and improve the degree of freedom in electric field design for the photoelectric conversion unit. [Solution] This optical detection device comprises: a plurality of photoelectric conversion units which are respectively provided to pixels and disposed inside a silicon layer; and a polysilicon layer and an insulating layer which are stacked, along the boundary region of the plurality of photoelectric conversion units, in the depth direction of the plurality of photoelectric conversion units from the side of a surface opposite the light incident surfaces of the plurality of photoelectric conversion units, wherein the boundary surface between the polysilicon layer and the insulating layer has a shape protruding toward the light incident surface.
Inventors:
SUGIMOTO MASATAKA (JP)
MIZUTA KYOHEI (JP)
MIZUTA KYOHEI (JP)
Application Number:
PCT/JP2022/045159
Publication Date:
October 26, 2023
Filing Date:
December 07, 2022
Export Citation:
Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
H01L27/146
Domestic Patent References:
| WO2019220945A1 | 2019-11-21 | |||
| WO2019093479A1 | 2019-05-16 |
Foreign References:
| US20170200763A1 | 2017-07-13 |
Attorney, Agent or Firm:
MIYAJIMA Manabu (JP)
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