OPTICAL DEVICE - HAMAMATSU PHOTONICS KK

Title:

OPTICAL DEVICE

Document Type and Number:

WIPO Patent Application WO/2019/097818

Kind Code:

A1

Abstract:

An optical device having first, second, third, and fourth movable comb electrodes that are arranged, when viewed from a first direction, between a first support section and a first end section on one side of a moveable section in a second direction, between a second support section and a second end section on the other side of the moveable section in the second direction, between a third support section and the first end section of the moveable section, and between a fourth support section and the second end section of the moveable section, respectively. The first and second support sections have a first beam section and a second beam section, respectively, that are formed so as to have the thickness thereof greater than the thickness of a first torsion bar. The third and fourth support sections have a third beam section and a fourth beam section, respectively, that are formed so as to have the thickness thereof greater than the thickness of a second torsion bar.

Inventors:

SUGIMOTO TATSUYA (JP)
SUZUKI TOMOFUMI (JP)
KOTANI KYOSUKE (JP)

Application Number:

PCT/JP2018/032760

Publication Date:

May 23, 2019

Filing Date:

September 04, 2018

Export Citation:

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Assignee:

HAMAMATSU PHOTONICS KK (JP)

International Classes:

G02B26/08; B81B3/00; G02B26/10; H02N1/00

Foreign References:

JP2008083122A	2008-04-10
US20120099176A1	2012-04-26
JP2009171394A	2009-07-30
JP2014238581A	2014-12-18
JP2012042666A	2012-03-01
US20050194650A1	2005-09-08

Other References: