Title:
OPTICAL ELEMENT FOR DISPLAY
Document Type and Number:
WIPO Patent Application WO/2005/031403
Kind Code:
A1
Abstract:
In order to provide an antireflection film having a uniform thickness and exhibiting excellent adhesion to a base (4), a plasma discharge chamber (12) having a gas supply port (14) for supplying gas G, a stage electrode (11), a prismatic electrode (13) and the like, is employed. The stage electrode (11) is applied with a first high frequency electric field of frequency &ohgr 1 and field intensity V1, and the prismatic electrode (13) is applied with a second high frequency electric field of frequency &ohgr 2 and field intensity V2. Assuming the intensity of the break-down electric field is IV, following conditions are satisfied; V1 ≥ IV > V2 or V1 > IV ≥ V2, &ohgr 2 > &ohgr 1.
Inventors:
MIZUNO WATARU (JP)
SAITO ATSUSHI (JP)
KUDO ICHIRO (JP)
SAITO ATSUSHI (JP)
KUDO ICHIRO (JP)
Application Number:
PCT/JP2004/014306
Publication Date:
April 07, 2005
Filing Date:
September 22, 2004
Export Citation:
Assignee:
KONICA MINOLTA HOLDINGS INC (JP)
MIZUNO WATARU (JP)
SAITO ATSUSHI (JP)
KUDO ICHIRO (JP)
MIZUNO WATARU (JP)
SAITO ATSUSHI (JP)
KUDO ICHIRO (JP)
International Classes:
C23C26/00; G02B1/10; G03B21/56; (IPC1-7): G02B1/10; C23C26/00
Foreign References:
| JP2003096569A | 2003-04-03 | |||
| JP2001355064A | 2001-12-25 | |||
| JPH03180467A | 1991-08-06 | |||
| JPH08199355A | 1996-08-06 | |||
| JPH0831753A | 1996-02-02 |
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