Title:
OPTICAL FILTERING METHOD, DEVICE THEREFOR, SUBSTRATE-DEFECT INSPECTION METHOD, AND APPARATUS THEREFOR
Document Type and Number:
WIPO Patent Application WO/2012/105055
Kind Code:
A1
Abstract:
In order to implement an optical inspection method and inspection device that have high defect-detection sensitivity and use an optical filtering device wherein arbitrary shutters can be opened and closed and closed shutters exhibit high light-blocking performance, an optical filtering device is provided with: a shutter array wherein a two-dimensional array of shutter patterns is formed on an optically-opaque thin film produced on a silicon-on-insulator (SOI) wafer, holes are formed by removing the parts of the SOI wafer underneath said shutter patterns, and working electrodes are formed on the remaining parts of the SOI wafer; a glass substrate on which the shutter array is mounted, an electrode pattern being formed on the surface of said glass substrate; and a power-feed unit that supplies power to the electrode pattern formed on the glass substrate and the working electrodes on the SOI wafer. By controlling the power supplied from the power-feed unit to the electrode pattern and working electrodes, the holes are opened and closed by the two-dimensional array of shutter patterns.
Inventors:
UENO TAKETO (JP)
NAKATA TOSHIHIKO (JP)
SHIBATA YUKIHIRO (JP)
MATSUMOTO SHUN ICHI (JP)
TANIGUCHI ATSUSHI (JP)
TOSHIYOSHI HIROSHI (JP)
TAKAHASHI TAKUYA (JP)
MOTOHARA KENTARO (JP)
NAKATA TOSHIHIKO (JP)
SHIBATA YUKIHIRO (JP)
MATSUMOTO SHUN ICHI (JP)
TANIGUCHI ATSUSHI (JP)
TOSHIYOSHI HIROSHI (JP)
TAKAHASHI TAKUYA (JP)
MOTOHARA KENTARO (JP)
Application Number:
PCT/JP2011/052426
Publication Date:
August 09, 2012
Filing Date:
February 04, 2011
Export Citation:
Assignee:
HITACHI LTD (JP)
UNIV TOKYO (JP)
UENO TAKETO (JP)
NAKATA TOSHIHIKO (JP)
SHIBATA YUKIHIRO (JP)
MATSUMOTO SHUN ICHI (JP)
TANIGUCHI ATSUSHI (JP)
TOSHIYOSHI HIROSHI (JP)
TAKAHASHI TAKUYA (JP)
MOTOHARA KENTARO (JP)
UNIV TOKYO (JP)
UENO TAKETO (JP)
NAKATA TOSHIHIKO (JP)
SHIBATA YUKIHIRO (JP)
MATSUMOTO SHUN ICHI (JP)
TANIGUCHI ATSUSHI (JP)
TOSHIYOSHI HIROSHI (JP)
TAKAHASHI TAKUYA (JP)
MOTOHARA KENTARO (JP)
International Classes:
G02B26/02; G01N21/956; G02B27/46
Foreign References:
| JP2000352943A | 2000-12-19 | |||
| JP2004184142A | 2004-07-02 | |||
| JP2004170111A | 2004-06-17 | |||
| JP2004287215A | 2004-10-14 | |||
| JPH1039239A | 1998-02-13 |
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
Polaire Intellectual Property Corporation (JP)
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Claims: