Title:
OPTICAL INSPECTION CIRCUIT
Document Type and Number:
WIPO Patent Application WO/2019/230372
Kind Code:
A1
Abstract:
This optical inspection circuit is provided with: an optical circuit (102) to be inspected, which is formed on a substrate (101); an input optical waveguide (103) that is optically connected to the optical circuit (102); and an output optical waveguide (104) that is optically connected to the optical circuit (102). An input grating coupler (105) is connected to the input optical waveguide (103). The grating coupler (105) is connected to the input optical waveguide (103) via a spot size conversion unit (106). A photodiode (107) is optically connected to the output optical waveguide (104).
Inventors:
FUKUDA HIROSHI (JP)
MIURA TORU (JP)
MAEDA YOSHIHO (JP)
MIURA TORU (JP)
MAEDA YOSHIHO (JP)
Application Number:
PCT/JP2019/019129
Publication Date:
December 05, 2019
Filing Date:
May 14, 2019
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE (JP)
International Classes:
G02B6/12; G02B6/122; G02B6/124; G02B6/34; G02B6/42; H01L31/10
Domestic Patent References:
| WO2016194349A1 | 2016-12-08 | |||
| WO2014034238A1 | 2014-03-06 | |||
| WO2014034655A1 | 2014-03-06 |
Foreign References:
| JP2015533259A | 2015-11-19 | |||
| JP2016170025A | 2016-09-23 | |||
| US20170082799A1 | 2017-03-23 |
Attorney, Agent or Firm:
YAMAKAWA, Shigeki et al. (JP)
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