Title:
OPTICAL MODULE
Document Type and Number:
WIPO Patent Application WO/2019/009401
Kind Code:
A1
Abstract:
This optical module 1 is provided with: a mirror unit 2 including a base 21, a movable mirror 22, and a fixed mirror 16; a beam splitter unit 3 which is provided to one side of the mirror unit 2 in a Z-axis direction; a light entrance part 4 which causes measurement light L0 to become incident on the beam splitter unit 3; a first photodetector 6 which is provided to the one side of the beam splitter unit 3 in the Z-axis direction, and which detects coherent light L1 of the measurement light emitted from the beam splitter unit 3; a support 9 to which the mirror unit 2 is attached; a first support structure 11 for supporting the beam splitter unit 3; and a second support structure 12 which is attached to the support 9, and which supports the first photodetector 6.
Inventors:
SUZUKI TOMOFUMI (JP)
KOTANI KYOSUKE (JP)
SUGIMOTO TATSUYA (JP)
KURAMOTO YUTAKA (JP)
KOTANI KYOSUKE (JP)
SUGIMOTO TATSUYA (JP)
KURAMOTO YUTAKA (JP)
Application Number:
PCT/JP2018/025644
Publication Date:
January 10, 2019
Filing Date:
July 06, 2018
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G01J3/45; G01B9/02; G02B7/198; G02B26/00
Domestic Patent References:
| WO2012164810A1 | 2012-12-06 | |||
| WO2010122879A1 | 2010-10-28 |
Foreign References:
| JP2005292033A | 2005-10-20 | |||
| JPH0324440A | 1991-02-01 | |||
| JPH07190712A | 1995-07-28 | |||
| JPH11183116A | 1999-07-09 | |||
| JPH04323502A | 1992-11-12 | |||
| US20060238768A1 | 2006-10-26 | |||
| JP2012524295A | 2012-10-11 |
Other References:
See also references of EP 3650820A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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