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Title:
OPTICAL PHASE SHIFTER STRUCTURE BASED ON STRESS-OPTICAL EFFECT
Document Type and Number:
WIPO Patent Application WO/2023/134214
Kind Code:
A1
Abstract:
The present invention provides an optical phase shifter structure based on a stress-optical effect. The optical phase shifter structure comprises: a waveguide layer structure, the waveguide layer structure comprising a phase modulation area; a phase shifting element, arranged on the phase modulation area of the waveguide layer structure; and a trench isolation area, arranged at the outer periphery of the phase modulation area, and used for isolating the phase modulation area from a peripheral area outside the trench isolation area so as to limit conduction of stress generated by the phase shifting element to the peripheral area. According to the optical phase shifter structure of the present invention, the stress-optical effect can be concentrated in the phase modulation area, and a refractive index change in a target optical waveguide core layer can be induced more effectively, such that a phase change in an optical signal can be induced in the case of a lower driving voltage and/or a short interaction length. According to the present invention, the stress optical phase modulation efficiency can be effectively improved, the driving voltage is reduced, and the problem of stress transverse crosstalk is mitigated.

Inventors:
YE ZHICHAO (CN)
LIU JUNQIU (CN)
JIA HAIYAN (CN)
Application Number:
PCT/CN2022/120794
Publication Date:
July 20, 2023
Filing Date:
September 23, 2022
Export Citation:
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Assignee:
QALEIDO PHOTONICS CO LTD (CN)
International Classes:
G02F1/01; G02B6/12
Foreign References:
CN1659469A2005-08-24
JP2004286830A2004-10-14
US20060204201A12006-09-14
CN111656263A2020-09-11
Attorney, Agent or Firm:
J.Z.M.C. PATENT AND TRADEMARK LAW OFFICE (GENERAL PARTNERSHIP) (CN)
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