Title:
OPTICAL SCANNING DEVICE AND DISTANCE MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/229689
Kind Code:
A1
Abstract:
An optical scanning device (1) is provided with a substrate (2) and a plurality of movable mirror elements (3). The substrate (2) includes a main surface (2a). The plurality of movable mirror elements (3) are two-dimensionally arranged on the main surface (2a) of the substrate (2). The plurality of movable mirror elements (3) are capable of operating independently of each other and capable of forming a diffraction grating. The plurality of movable mirror elements (3) each include a beam (18a), a movable mirror (20), and a column (23). The beam (18a) is flexible in a direction perpendicular to the main surface (2a). The movable mirror (20) includes a movable plate (21) and a mirror film (22) disposed on the movable plate (21). The column (23) connects the movable plate (21) and the beam (18a).
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Inventors:
KONNO NOBUAKI (JP)
ITO TAKAHIKO (JP)
ITO TAKAHIKO (JP)
Application Number:
PCT/JP2020/018997
Publication Date:
November 18, 2021
Filing Date:
May 12, 2020
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G02B26/10
Foreign References:
| US6664706B1 | 2003-12-16 | |||
| JP2020511666A | 2020-04-16 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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