Title:
OPTICAL SCANNING DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2020/188732
Kind Code:
A1
Abstract:
This optical scanning device (1) is provided with a scanning structure (3), an anchor (21) and drive units (7). The drive units (7) include a first drive unit (7a) and a second drive unit (7b). The first drive unit (7a) is provided with a first drive beam (9a), electrode wiring (13a), a pair of support bodies (17), and thin-film magnets (15a, 15b). The first drive beam (9a) has a first fixed end connected to the support bodies (17) and a first drive end connected to the scanning structure (3). The electrode wiring (13a) is formed in the first drive beam (9a). The support bodies (17) are each connected to the anchor (21) and arranged with the first drive beam (9a) sandwiched therebetween. The thin-film magnets (15) are respectively arranged on the support bodies (17). The thin-film magnets (15) are arranged in a configuration in which lines of magnetic force are generated in a direction crossing the direction in which the electrode wiring (13a) extends.
Inventors:
KONNO NOBUAKI (JP)
HIRATA YOSHIAKI (JP)
ITO TAKAHIKO (JP)
HIRATA YOSHIAKI (JP)
ITO TAKAHIKO (JP)
Application Number:
PCT/JP2019/011392
Publication Date:
September 24, 2020
Filing Date:
March 19, 2019
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G02B26/08; G02B26/10
Domestic Patent References:
| WO2018079669A1 | 2018-05-03 |
Foreign References:
| JP2019041513A | 2019-03-14 | |||
| JP2007014130A | 2007-01-18 | |||
| JP2017167254A | 2017-09-21 | |||
| JP2014240911A | 2014-12-25 | |||
| JP2019015933A | 2019-01-31 | |||
| JPH07175005A | 1995-07-14 | |||
| CN104597596A | 2015-05-06 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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