Title:
OPTICAL SCANNING DEVICE AND METHOD FOR MANUFACTURING SAME, AND RANGING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/229757
Kind Code:
A1
Abstract:
An optical scanning device (1) comprises, as a MEMS mirror, a reflector (3) having a reflecting surface (27a) formed from a metal film (27); a support (5); a drive beam (7); and a drive unit (10). The support (5) is disposed so as to surround the reflector (3) at a distance in between. The drive beam (7) connects the reflector (3) to the support (5). A first protection film (31a) is formed over the entirety of the upper surface, lower surface, and opposing side surfaces including the side wall surfaces of a second semiconductor layer (15) in the drive beam (7). A silicon oxide film, silicon nitride film, alumina film, or titania film is formed, as the first protection film (31a) by atomic layer deposition.
Inventors:
SHIRAYANAGI YUSUKE (JP)
KAJIYAMA YOSHITAKA (JP)
KAJIYAMA YOSHITAKA (JP)
Application Number:
PCT/JP2020/019295
Publication Date:
November 18, 2021
Filing Date:
May 14, 2020
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G02B26/10
Foreign References:
| JP2013035081A | 2013-02-21 | |||
| JP2003270555A | 2003-09-25 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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