Title:
OPTICAL WAVEGUIDE SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2017/068847
Kind Code:
A1
Abstract:
This optical waveguide substrate (1) is provided with an optical waveguide (9) having an end face through which light enters and exits, the optical waveguide (9) being composed of a multilayered film (4) having a plurality of optical material films (5, 6). The end face is an etched surface, and concavities and convexities (7) produced by a difference in etching rate of the optical material films (5, 6) are provided to the end face.
Inventors:
ASAI KEIICHIRO (JP)
YAMAGUCHI SHOICHIRO (JP)
YAMAGUCHI SHOICHIRO (JP)
Application Number:
PCT/JP2016/074175
Publication Date:
April 27, 2017
Filing Date:
August 19, 2016
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
G02B6/122; G02B6/132; G02B6/136
Foreign References:
| JP2000012954A | 2000-01-14 | |||
| JP2010079041A | 2010-04-08 | |||
| JPH0529298A | 1993-02-05 | |||
| JPH0545514A | 1993-02-23 | |||
| JP2004349636A | 2004-12-09 |
Attorney, Agent or Firm:
HOSODA Masutoshi et al. (JP)
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