CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims priority to U.S. Provisional Patent Application No. 62/934,046, filed on November 12, 2019, entitled “EPITAXIAL GROWTH OF HIGH CRYSTAL QUALITY b-ΰ3203 THIN FILMS ON Ce02- BUFFERED FLEXIBLE SUBSTRATE,” the disclosure of which is incorporated herein by reference in its entirety.

BACKGROUND

TECHNICAL FIELD

[0002] Embodiments of the disclosed subject matter generally relate to optoelectronic devices having a Ill-oxide active layer formed on a flexible substrate.

DISCUSSION OF THE BACKGROUND

[0003] Ill-oxide materials (i.e. , materials with oxide in combination with a group-ill material, i.e., at least one of aluminum, boron, gallium, and indium) have a number advantageous properties, including a large bandgap range. Thus, Ill-oxides are often used in optoelectronic devices, such as photodetectors. For example, thin film Ga203 is often used in deep ultra-violet (DUV) photodetectors that detect radiation in the range of approximately 100 - 280 nm. These photodetectors can accordingly be used in a number of applications, including monitoring ozone holes, detecting flame, space communication, missile guidance, biochemical detection, and inspection of UV leakage. In many applications, it is desirable for the Ill-oxide layer to be on a flexible substrate.

[0004] There are currently a limited number of ways of forming Ga2C>3 thin film on a flexible substrate. For example, Reference [1] discloses growing single crystal b-Q82q3 thin film on rigid sapphire substrates. The thin film can then be removed from the sapphire substrate and transferred to a flexible substrate. The removal and transfer of the single crystal b-Q82q3 thin film from a rigid sapphire substrate to a flexible substrate is very complicated and suffers from low reproducibility (i.e. , successful transfer cannot reliably be repeated using any particular transfer technique).

[0005] Reference [2] discloses growing amorphous Ga2C>3 thin film on a flexible substrate. Amorphous Ga203 has low thermal stability, which limits the applications for a photodetector having amorphous Ga203. In contrast, single crystal b-ΰ32q3 has a high thermal stability, and thus can be used in extreme environments. Furthermore, devices formed using amorphous Ga203 typically do not perform as well as those formed using single crystal Ga203.

[0006] Reference [3] discloses growing polycrystalline b-ΰ32q3 on flexible silica substrates. In contrast to single crystal b-ΰ32q3, polycrystalline b-ΰ32q3 suffers from high leaking-current.

[0007] Thus, it would be desirable to provide methods for forming optoelectronic devices having a crystallized Ill-oxide thin film on a flexible substrate without requiring transferring the crystallized Ill-oxide thin film from a rigid substrate to the flexible substrate. It would also be desirable to provide methods for forming optoelectronic devices having a crystallized Ill-oxide thin film on a flexible substrate that possess high thermal stability and do not suffer from high leaking-current.

SUMMARY

[0008] According to an embodiment, there is an optoelectronic device, which includes a flexible substrate, a cerium oxide (CeCte) layer arranged on the flexible substrate, a single crystal b-lll-oxide layer arranged on the CeC>2 layer, and a metallic contact layer arranged on the single crystal b-lll-oxide layer.

[0009] According to another embodiment, there is a method for forming an optoelectronic device. A flexible substrate is provided and a cerium oxide (CeC ) layer is formed on the flexible substrate. A single crystal b-III- oxide layer is formed on the CeC>2 layer. A metallic contact layer is formed on the single crystal b-lll-oxide layer.

BRIEF DESCRIPTION OF THE DRAWINGS

[0010] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate one or more embodiments and, together with the description, explain these embodiments. In the drawings:

[0011] Fig. 1 is a schematic diagram of an optoelectronic device according to embodiments;

[0012] Fig. 2 is a flow diagram of a method for forming an optoelectronic device according to embodiments;

[0013] Fig. 3 is a flow diagram of a method for forming a metallic contact layer for an optoelectronic device according to embodiments; and

[0014] Fig. 4 is a schematic diagram of interdigitated contacts according to embodiments.

DETAILED DESCRIPTION

[0015] The following description of the exemplary embodiments refers to the accompanying drawings. The same reference numbers in different drawings identify the same or similar elements. The following detailed description does not limit the invention. Instead, the scope of the invention is defined by the appended claims. The following embodiments are discussed, for simplicity, with regard to the terminology and structure of Ill-oxides.

[0016] Reference throughout the specification to “one embodiment” or “an embodiment” means that a particular feature, structure or characteristic described in connection with an embodiment is included in at least one embodiment of the subject matter disclosed. Thus, the appearance of the phrases “in one embodiment” or “in an embodiment” in various places throughout the specification is not necessarily referring to the same embodiment. Further, the particular features, structures or characteristics may be combined in any suitable manner in one or more embodiments.

[0017] Fig. 1 illustrates an optoelectronic device 100, which includes a flexible substrate 105, a cerium oxide (CeCte) layer 110 arranged on the flexible substrate 105, a single crystal b-II l-oxide layer 115 arranged on the CeC>2 layer 110, and a metallic contact layer 120 arranged on the single crystal b-lll-oxide layer 115. It will be recognized that a low lattice-mismatch between the single crystal b-I I l-oxide layer 115 and the layer on which it is grown, the CeC>2 layer 110 in this disclosure, is critical for epitaxial growth of a single crystal Ill-oxide layer. In this disclosure, it is advantageous to grow the single crystal b-I I l-oxide layer 115 on the CeC>2 layer 110 because of the low lattice-mismatch (in two directions that are perpendicular with each other, i.e., Ga2C>3 (-201) plane grown on CeC>2 (001)) between these two layers; the lattice mismatch being in the range of 4% - 11 %. The low lattice-mismatch in two directions perpendicular to each other arises due to the twelve-fold symmetry of the single crystal b-lll-oxide layer 115 grown on the CeC>2 layer 110, whereas a single crystal b-lll-oxide layer grown on a sapphire substrate has a low lattice-mismatch in one direction due to the six-fold symmetry of the single crystal b-lll-oxide layer grown on sapphire.

[0018] As used herein, the term flexible substrate refers to a substrate that can be repeatably bent down to a radii of 8 mm without cracking. In an embodiment, the flexible substrate 105 is a metal (e.g., copper or silver) or metal alloy substrate. This is particularly advantageous because a metal or metal alloy substrate is able to withstand the high temperatures required to grow the single crystal b-lll-oxide layer 115. In an embodiment, the flexible substrate is a superalloy. For example, the superalloy can be a nitrogen-, iron-, or copper-superalloy. Although the flexible substrate 105 has been described as a metal, metal alloy, or metal superalloy, the flexible substrate can be comprised of any material that can be repeatably bent down to a radii of 8 mm without cracking and can withstand the growth temperature of the single crystal b-lll-oxide layer 115, which can be between approximately 600°C and 1,000 °C. Thus, a flexible substrate that is stable at growth temperatures of at least 600°C can be employed. Those skilled in the art can easily identify a number of different substrates satisfying these conditions.

[0019] In some cases, the CeC>2 layer 110 can be grown directly on the flexible substrate 105. In other cases, the upper surface of the flexible substrate may be rough resulting in a large lattice-mismatch between the CeC>2 layer 110 and the substrate 105. In this case, buffer or planarization layer(s) can be interposed between the CeC>2 layer 110 and the substrate 105. In a non-limiting embodiment, the buffer layers can include a layer of amorphous AI2O3 formed on the flexible substrate 105 and a layer of amorphous Y2O3 formed on the amorphous AI2O3 layer. Those skilled in the art can easily identify whether a buffer or planarization layer(s) is required for a particular flexible substrate based on known measurements of surface roughness. Those skilled in the art can also identify, based on the known measurements of surface roughness, the number and composition of buffer or planarization layer(s) to address the surface roughness.

[0020] The single crystal b-lll-oxide layer 115 can comprise aluminum oxide (AIO3), boron oxide (BO3), gallium oxide (GaC ), or indium oxide (InC ). Furthermore, the single crystal b-lll-oxide layer 115 can comprise a group-ill alloy, i.e. , a combination of oxide and more than one of aluminum, boron, gallium, and indium. In one non limiting embodiment, the single crystal b-lll-oxide layer 115 comprises single crystal b- Ga2C>3.

[0021] In an embodiment, the metallic contact layer 120 comprises a pair of interdigitated contacts, a non-limiting example of which is illustrated in Fig. 4. In a non limiting embodiment, the pair of interdigitated contacts comprise titanium and gold. It should be recognized, however, that the metallic contact layer 120 can take any desired form depending upon implementation of the optoelectronic device 100.

[0022] In an embodiment, the optoelectronic device is a deep ultraviolet photodetector. Specifically, Ill-oxides have a band gap corresponding to wavelengths in the range of 100 - 350 nm, which covers the wavelength ranges of 100 - 200 nm for diatomic oxygen and 200 - 280 nm for triatomic oxygen in the atmosphere that is typically used by solar-blind deep ultraviolet (DUV) photodetectors.

[0023] Fig. 2 is a flowchart of a method for forming an optoelectronic device 100 according to embodiments. Initially, a flexible substrate 105 is provided (step 205). A cerium oxide (CeC ) layer 110 is then formed on the flexible substrate 105 (step 210).

A single crystal b-lll-oxide layer 115 is formed on the CeC>2 layer 110 (step 215). A metallic contact layer 120 is formed on the single crystal b-lll-oxide layer 115 (step 220). Unlike prior methods in which the single crystal b-lll-oxide layer is first formed on a rigid substrate and then transferred to a flexible substrate, the optoelectronic device 100 can be formed entirely within a single growth chamber using a single growth process. Alternatively, the CeC>2 layer 110 and single crystal b-lll-oxide layer can be formed in a single growth chamber using a single growth process and the metallic contact layer 120 can be formed in a separate growth process in the same or different growth chamber. The growth process can be any suitable growth process for Ill- oxides, including metal-organic chemical vapor deposition (MOCVD), pulsed laser deposition (PLD), chemical solution deposition (CSD), or molecular-beam epitaxy (MBE).

[0024] It should be recognized that the composition of the flexible substrate 105, the flexibility of the flexible substrate 105, and the composition of the single crystal b-III- oxide layer 115 produced by the method described in connection with Fig. 2 are the same as described above in connection with Fig. 1.

[0025] Fig. 3 is a flow chart of a method for forming a metallic contact layer according to embodiments. The structure comprising the flexible substrate 105, CeC>2 layer 110, and single crystal b-I I l-oxide layer 115 is used. First, a photoresist coating is applied to the single crystal b-I I l-oxide layer 115 (step 305), and the structure is baked (step 310). The baked photoresist is then patterned into the desired pattern of the metallic contact layer 120 (step 315), followed by development (step 320). The metal for the metallic contact layer 120 is then evaporated onto the patterned photoresist so that it adheres to areas that are not covered by photoresist (step 325). The structure is then washed (step 330) and subjected to an ultrasonic bath (step 335). This method of forming the metallic contact layer should be understood as a non-limiting example and that other techniques for forming metallic contact layers can be employed.

[0026] Although embodiments have been described as forming a single crystal b-I I l-oxide layer 115 grown on the CeC>2 layer 110, which in turn is formed on a flexible substrate, a single crystal b-I I l-oxide layer can be grown on a CeC>2 layer, which in turn is grown on a rigid substrate.

[0027] The disclosed embodiments provide an optoelectronic device with a single crystal Ill-oxide layer that can be formed on a flexible substrate. It should be understood that this description is not intended to limit the invention. On the contrary, the exemplary embodiments are intended to cover alternatives, modifications and equivalents, which are included in the spirit and scope of the invention as defined by the appended claims. Further, in the detailed description of the exemplary embodiments, numerous specific details are set forth in order to provide a comprehensive understanding of the claimed invention. However, one skilled in the art would understand that various embodiments may be practiced without such specific details.

[0028] Although the features and elements of the present exemplary embodiments are described in the embodiments in particular combinations, each feature or element can be used alone without the other features and elements of the embodiments or in various combinations with or without other features and elements disclosed herein.

[0029] This written description uses examples of the subject matter disclosed to enable any person skilled in the art to practice the same, including making and using any devices or systems and performing any incorporated methods. The patentable scope of the subject matter is defined by the claims, and may include other examples that occur to those skilled in the art. Such other examples are intended to be within the scope of the claims.

References

[1] Yu, F.-P., et al. (2015). "Pulsed laser deposition of gallium oxide films for high performance solar-blind photodetectors." Optical Materials Express 5(5).

[2] Cui, S., et al. (2017). "Room-Temperature Fabricated Amorphous Ga203 High- Response-Speed Solar-Blind Photodetector on Rigid and Flexible Substrates." Advanced Optical Materials 5(19).

[3] Wang, S., et al. (2019). "In situ synthesis of monoclinic b-Q82q3 nanowires on flexible substrate and solar-blind photodetector." Journal of Alloys and Compounds 787: 133-

139.