Title:
ORGANIC SUBSTANCE DEPOSITION DEVICE AND ORGANIC SUBSTANCE DEPOSITION METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2015/068866
Kind Code:
A1
Abstract:
Disclosed are an organic substance deposition device and an organic substance deposition method using the same. The present invention relates to an organic substance deposition device and a deposition method using the same, wherein deposition processes are conducted with regard to a plurality of substrates inside a single chamber and, during a deposition process with regard to a substrate, a transfer process or an alignment process with regard to another substrate is conducted, thereby reducing tact time and reducing loss of organic substance materials occurring during processes for transferring or aligning substrates.
Inventors:
LEE YOUNG JONG (KR)
PARK CHAN SEOK (KR)
PARK CHAN SEOK (KR)
Application Number:
PCT/KR2013/009960
Publication Date:
May 14, 2015
Filing Date:
November 05, 2013
Export Citation:
Assignee:
SUNIC SYSTEM LTD (KR)
International Classes:
H01L51/56; C23C14/24
Foreign References:
| KR101237507B1 | 2013-02-26 | |||
| KR101239906B1 | 2013-03-06 | |||
| KR20100120081A | 2010-11-12 |
Attorney, Agent or Firm:
ZENA PATENT LAW FIRM (KR)
특허법인 제나 (KR)
특허법인 제나 (KR)
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