Title:
ORGANO-TRANSITION METAL COMPOUND AND PREPARATION METHOD THEREFOR, AND METHOD FOR FORMING TRANSITION METAL-CONTAINING FILM
Document Type and Number:
WIPO Patent Application WO/2022/222210
Kind Code:
A1
Abstract:
Disclosed in the present invention are an organo-transition metal compound and a preparation method therefor, and a method for forming a transition metal-containing film. The structural formula of the organo-transition metal compound is selected from one as shown in the figure. Low-valence transition metal and pinene are subjected to carbon-carbon bond oxidative addition to obtain a chelated organo-transition metal compound. An organo-transition metal complex is used as a metal precursor, and by studying the atomic deposition process of the complex, it is proved that the complex well follows ideal atomic layer deposition growth to deposit a transition metal-containing film having a high purity and a flat surface. Moreover, it is further proved that in this atomic layer deposition process, the transition metal-containing film can be conformally deposited in a deep-width trench, which indicates that these methods are very suitable for obtaining the transition metal-containing film by means of uniform and conformal deposition on a complex or porous three-dimensional nano-stereostructured substrate.
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Inventors:
WANG XINWEI (CN)
LU KE (CN)
LU KE (CN)
Application Number:
PCT/CN2021/093880
Publication Date:
October 27, 2022
Filing Date:
May 14, 2021
Export Citation:
Assignee:
UNIV PEKING SHENZHEN GRADUATE SCHOOL (CN)
International Classes:
C07F15/06; C23C16/18; C23C16/30; C23C16/34; C23C16/40
Foreign References:
| CN109824736A | 2019-05-31 |
Other References:
JENNY TITUS A., HUBER VRONI, MA LIQIAN, RAEMY JACQUES, ZELLER DAVID, STOECKLI-EVANS HELEN: "Synthesis, X-ray Structure, and Reactivity of Phosphine-Substituted Iron Carbonyl Complexes Containing σ -Alkyl− π -Allyl Ligands", ORGANOMETALLICS, AMERICAN CHEMICAL SOCIETY, vol. 21, no. 12, 1 June 2002 (2002-06-01), pages 2504 - 2513, XP055981322, ISSN: 0276-7333, DOI: 10.1021/om010781s
JENNY TITUS A, MA LIQIAN: "Synthetic Use of a o-Alkyl-z-Ally1 Iron Complex Obtained by Stereospecific Ring Opening of a-Pinene", TETRAHEDRON LETTERS, ELSEVIER, AMSTERDAM , NL, vol. 32, no. 43, 1 January 1991 (1991-01-01), Amsterdam , NL , pages 6101 - 6104, XP055981325, ISSN: 0040-4039
FAN JANG-SHYANG, LIU RAI-SHUNG: "A Transition-Metal−η 4 -Diene Cation Can Undergo Nucleophilic Addition at the Internal Carbon", ORGANOMETALLICS, AMERICAN CHEMICAL SOCIETY, vol. 17, no. 6, 1 March 1998 (1998-03-01), pages 1002 - 1003, XP055981329, ISSN: 0276-7333, DOI: 10.1021/om971033z
JENNY TITUS A, MA LIQIAN: "Synthetic Use of a o-Alkyl-z-Ally1 Iron Complex Obtained by Stereospecific Ring Opening of a-Pinene", TETRAHEDRON LETTERS, ELSEVIER, AMSTERDAM , NL, vol. 32, no. 43, 1 January 1991 (1991-01-01), Amsterdam , NL , pages 6101 - 6104, XP055981325, ISSN: 0040-4039
FAN JANG-SHYANG, LIU RAI-SHUNG: "A Transition-Metal−η 4 -Diene Cation Can Undergo Nucleophilic Addition at the Internal Carbon", ORGANOMETALLICS, AMERICAN CHEMICAL SOCIETY, vol. 17, no. 6, 1 March 1998 (1998-03-01), pages 1002 - 1003, XP055981329, ISSN: 0276-7333, DOI: 10.1021/om971033z
Attorney, Agent or Firm:
JOHNSON INTELLECTUAL PROPERTY AGENCY (SHENZHEN) (CN)
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